Basket suitable for inserting large-size silicon wafers and preventing silicon wafers from bending and sticking
A silicon wafer insert, large-size technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of unfavorable silicon wafer insert production, easy bending of silicon wafers, and large size of silicon wafers. Simple, reduce the degree of deformation, reduce the effect of fragmentation rate
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0038] A flower basket suitable for inserting large-size silicon wafers and preventing silicon wafers from bending and sticking, such as Figure 1-3 As shown, it includes a first end plate 1 and a second end plate 4, the first end plate 1 and the second end plate 4 are arranged in parallel, and between the first end plate 1 and the second end plate 4, there are multiple pairs of mutually parallel The support rod 2, the first end plate 1 and the second end plate 4 are located at both ends of multiple pairs of support rods 2 parallel to each other, and the first end plate 1 and the second end plate 4 are respectively detachable from the two ends of the support rod 2 Connected so that the first end plate 1, the second end plate 4 and multiple pairs of support rods 2 form the frame of the flower basket. When inserting silicon wafers, insert multiple pairs of support rods 2, the first end plate 1 and the second end plate 4 In the formed space, multiple pairs of support rods 2 suppo...
Embodiment 2
[0052] This embodiment is compared with Embodiment 1. The difference between the two lies in the structure of the connecting portion of the supporting tooth, and other structures are the same. In the embodiment, the structure of the supporting tooth is described, and other structures will not be repeated.
[0053] Such as Figure 4 with Figure 5 As shown, the supporting tooth 5 has a supporting part 51, and the supporting part 51 is in point contact with the silicon chip, which reduces the deformation of the silicon chip. After the silicon chip is inserted, the supporting part 51 supports the silicon chip, and the supporting tooth 5 has a certain length, so that the force of the silicon wafer is non-edge force, reducing the deformation of the silicon wafer.
[0054] Specifically, the support tooth 5 includes a connection portion 50 and a support portion 51, the connection portion 50 is connected to the support portion 51, that is, one end of the connection portion 50 is fixe...
Embodiment 3
[0057] Compared with Embodiment 1 and Embodiment 2, this embodiment differs in the structure of the supporting teeth, and other structures are the same. In this embodiment, the structure of the supporting teeth will be described in detail, and other structures will not be repeated.
[0058] Such as Image 6 with Figure 7 As shown, the above-mentioned supporting tooth 5 has a supporting part 51, and the supporting part 51 is in point contact with the silicon chip, which reduces the deformation of the silicon chip. After the silicon chip is inserted, the supporting part 51 supports the silicon chip, and the supporting tooth 5 has a certain The length of the silicon wafer makes the force of the silicon wafer non-edge force and reduces the deformation of the silicon wafer.
[0059] The support tooth 5 includes a connection part 50 and a support part 51, the connection part 50 is connected to the support part 51, and one end of the support part 51 is fixedly connected to the supp...
PUM
| Property | Measurement | Unit |
|---|---|---|
| length | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 


