A film coating device for preventing offset in semiconductor production
A coating device and semiconductor technology, which is applied to the surface coating liquid device, pretreatment surface, coating, etc., can solve problems such as troublesome, semiconductors are prone to offset, etc., and achieve the effect of easy installation and disassembly
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[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0025] see Figure 1-4, the present invention provides a technical solution: a coating device for semiconductor production that prevents deviation, including a device main body 1, a first motor 2, a vertical screw rod 3, a fixed rod 4, a connecting sleeve 5, a spiral sleeve 6, First rotating shaft 7, adjusting rod 8, card slot 9, first coating device 10, second coating device 11, second motor 12, second rotating shaft 13, first gear 14, second gear 15, first s...
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