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Rolling device and rolling method for target material

A target and rolling mill technology, applied in metal rolling, metal rolling, manufacturing tools, etc., can solve the problems of transmission efficiency and safety to be improved, and achieve the effect of improving efficiency and safety

Inactive Publication Date: 2020-02-14
合肥江丰电子材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the transmission efficiency and safety of the existing rolling process need to be improved

Method used

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  • Rolling device and rolling method for target material
  • Rolling device and rolling method for target material
  • Rolling device and rolling method for target material

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Experimental program
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Effect test

Embodiment Construction

[0030] As mentioned in the background art, the transmission efficiency and safety of the existing rolling process need to be improved.

[0031] A rolling device, refer to figure 1 , including: an upper tie mix 100 and a lower tie mix 110, the upper tie mix 100 is located above the lower tie mix 110, there is a gap between the upper tie mix 100 and the lower tie mix 110; a propulsion platform 120 , the surface of the propelling platform 120 has driving rollers (not shown).

[0032] In the process of using the above-mentioned rolling device, the target material 130 is usually transported to the driving roller on the surface of the propulsion platform 120 by a forklift, and then the target material 130 is pushed to the upper and lower rolls by manually pushing the target 130. Between the mixing 110; through the rotation of the upper binding 100 and the lower binding 110, the target 130 located between the upper binding 100 and the lower binding 110 is rolled; after multiple pass...

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Abstract

The invention discloses a rolling device and a rolling method for a target material. The rolling device for the target material comprises a rolling mill main body and an automatic carrying platform, wherein the rolling mill main body comprises an upper roller and a lower roller, a rotating center axis of the upper roller and a rotating central axis of the lower roller are parallel, and a gap is formed between the upper roller and the lower roller; the automatic carrying platform is located on the side part of the rolling mill main body, faces the gap, and is used for conveying the target material to the position between the upper roller and the lower roller; and the automatic carrying platform comprises a base table, a motor set, a plurality of transmission rolling bars and a plurality ofbearings, the plurality of transmission rolling bars are located on the base table and arranged in a direction parallel to the surface of the base table, the central axes of the plurality of transmission rolling bars are parallel to the rotating central axis of the lower roller, the plurality of bearings are fixed on the surface of the base table, the bearings are connected with the two ends of the transmission rolling bars correspondingly in a sleeving manner, and the motor set is used for driving the transmission rolling bars to rotate around the central axes of the transmission rolling barscorrespondingly. The rolling device improves the conveying efficiency and safety.

Description

technical field [0001] The invention relates to the field of mechanical processing, in particular to a target rolling device and rolling method. Background technique [0002] Physical vapor deposition is one of the most critical processes in the production of semiconductor chips and TFT-LCDs. The sputtering metal target used in physical vapor deposition is one of the most important raw materials in the production of semiconductor chips and the preparation and processing of TFT-LCD. Among them, the sputtering metal target is obtained by using a metal material and undergoing a certain plastic deformation process. [0003] There are many plastic deformation processes, the common ones are free forging, die forging, sheet metal stamping, extrusion, drawing and rolling. Among them, the rolling process is widely used in the plastic deformation processing of metal materials. [0004] However, the transmission efficiency and safety of the existing rolling process need to be improv...

Claims

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Application Information

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IPC IPC(8): B21B39/06
CPCB21B39/06
Inventor 姚力军潘杰王学泽丁向前
Owner 合肥江丰电子材料有限公司
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