Ultra-fast laser micro trimming system of sensitive functional parts of resonant inertial device

A technology of inertial devices and ultrafast lasers, which is applied to instruments, measuring devices, and navigation through speed/acceleration measurements, can solve the problems of poor accuracy of trimming and deduplication and low trimming efficiency, and achieve simple trimming steps, Realize the effect of adjusting positioning accuracy and avoiding workpiece assembly and positioning operations

Active Publication Date: 2020-02-18
BEIJING INST OF AEROSPACE CONTROL DEVICES
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Problems solved by technology

[0006] The purpose of the present invention is to propose an ultra-fast laser micro-adjustment system for sensitive functional components of resonant inertial devices, so as to solve the technical problems of low efficiency of equipment adjustment and poor accuracy of adjustment and deduplication

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  • Ultra-fast laser micro trimming system of sensitive functional parts of resonant inertial device

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Embodiment Construction

[0030] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0031] The invention discloses an ultrafast laser micro-adjustment system for sensitive functional components of a resonant inertial device, and belongs to the technical field of resonant inertial device manufacturing. The ultrafast laser micro-adjustment system for sensitive functional components of resonant inertial devices disclosed in the present invention includes an ultrafast laser, a beam splitter, a photoelectric detector, a polarizer, an electro-optical modulator, an analyzer, a laser processing head, an excitation And detection tooling, multi-axis motion platform, frequency cracking analyzer, industrial computer, vacuum chamber and vacuum pump.

[0032] Real-time excitation and detection of inertial characteristic changes of the workpiece to be repaired by the frequency cracking analyzer, feedback and control of ultra-fast laser sy...

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Abstract

The invention discloses an ultra-fast laser micro trimming system of sensitive functional parts of a resonant inertial device. Changes in the inertial characteristics of a workpiece to be trimmed areexcited and detected in real time through a frequency cracking analyzer, and ultra-fast laser is fed back and controlled to synchronize and accurately de-weight, so that a laser micro trimming function of the sensitive functional parts of the resonant inertial device is realized. The trimming process and detection process are completed in a vacuum chamber, the in-situ trimming function of the sensitive functional parts of the resonant inertial device can be realized. Pulse number of the laser trimming is accurately controlled through a photodetector, an electro-optic modulator and an analyzer,and the technical indexes of submicrogram precision trimming of the sensitive functional parts of the resonant inertial device are realized. The ultra-fast laser micro trimming system has the advantages of simple and convenient trimming operation, high trimming accuracy and controllable trimming area, etc., and has wide application prospects in the inertial navigation system in the aerospace field.

Description

technical field [0001] The invention belongs to the technical field of manufacturing resonant inertial devices, and in particular relates to an ultrafast laser micro-adjustment system for sensitive functional components of resonant inertial devices. Background technique [0002] Resonant inertial devices mainly include hemispherical resonant gyroscope, micro hemispherical resonant gyroscope, quartz pendulum accelerometer and quartz beam accelerometer, etc. Resonant inertial devices have the characteristics of high precision, low energy consumption, long life, impact resistance, simple structure, and maintenance-free, and have been widely used in the aerospace field in recent years. The sensitive functional components of the resonant inertial device form a standing wave with resonance characteristics due to deflection and deformation. The standing wave will cause the precession of the vibration mode under external excitation conditions. The attitude or position information ca...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C25/00G01C21/12
CPCG01C21/12G01C25/005
Inventor 雷名威李本海高文焱王军龙王学锋江淮李广李凯侯振兴张路
Owner BEIJING INST OF AEROSPACE CONTROL DEVICES
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