A flexible pressure sensor based on a discrete contact structure and its preparation method
A pressure sensor and flexible technology, applied in the field of micro-sensors, can solve the problems of complex process, large influence of sensor temperature, large lag, etc., to achieve the effect of simple preparation process, expanded application scope, and simple principle
Active Publication Date: 2021-12-24
SHANGHAI JIAOTONG UNIV
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Problems solved by technology
This kind of sensor is greatly affected by temperature, the process is complicated, and the measuring range is small.
In recent years, composite materials have been extensively studied as sensitive components, which can be used to make flexible electronic skins, but the hysteresis is large and the stability is poor.
Method used
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[0047] In the following description, the invention will be described with reference to each embodiment. However, those skilled in the art will recognize that each of the examples can be carried out without one or more specific details or with other alternatives and / or additional methods, materials or components. In other circumstances, well-shown or not described in detail, is not described in detail to avoid obscuring the various embodiments of the embodiments of the present invention. Similarly, for the purpose of explanation, specific quantities, materials, and configurations are set forth in order to provide a comprehensive understanding of the embodiments of the present invention. However, the present invention can be implemented without specific details. Further, it is understood that the embodiments shown in the drawings are illustrative and not necessarily drawn.
[0048] In the present specification, reference to "one embodiment" or "Example" means that the specific fea...
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Abstract
The invention discloses a flexible pressure sensor based on a discrete contact structure and a preparation method thereof, comprising: a flexible substrate; a lower electrode, the lower electrode is arranged on the flexible substrate; a contact array, the contact array formed on the lower electrode and in electrical contact with the lower electrode; supporting sidewalls and extending electrode layers, the supporting sidewalls being disposed around the lower electrode and electrically isolated from the lower electrode; and a suspended mesh electrode, The suspended mesh electrodes are formed on the supporting sidewalls and lead out through the extension electrodes, wherein the suspended mesh electrodes are separated from the contact array by a certain distance under the condition of no external force. The conductive filler nano-graphite particles of the invention can be uniformly dispersed in PI, and the formed composite material has good electrical conductivity and mechanical properties. The invention has the characteristics of simple preparation process, sensitive response, large measuring range and low cost.
Description
Technical field [0001] The present invention relates to microsensor technology and the technical field of MEMS. In particular, the present invention relates to a flexible pressure sensor based on discrete contact structure and a preparation method thereof. Background technique [0002] With the development of humanity and the high degree of science and technology, people's requirements for life quality are getting higher and higher, which greatly promotes smart wearable equipment, robots, drones, automatic driving, etc. to facilitate people's work life. Research and development, and the development of these products is inseparable from the pressure sensor. [0003] The basic principle of the pressure sensor mainly has resistance strain, piezoelectric, capacitive, inductive, and dielectric. [0004] For the resistance strainable chip sensor, the measured dynamic pressure is applied to the elastic sensitive element, making it deforming, and the resistance strain sheets that are def...
Claims
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IPC IPC(8): G01L1/00G01L1/20G01L9/00G01L9/02B81B3/00C25D5/02C25D5/34C25D7/00
CPCG01L1/00G01L1/205G01L9/00G01L9/02B81B3/0021C25D5/022C25D5/34C25D7/00B81B2201/0264
Inventor 刘扬丁桂甫李红芳黄建泽杨卓青
Owner SHANGHAI JIAOTONG UNIV