AFM equipment and temperature changing device and temperature changing method thereof
A temperature-variable device and equipment technology, which is applied in the direction of measuring devices, instruments, scanning probe microscopy, etc., can solve the problems of increasing the actual load of the displacement table, small temperature range, and reducing the resolution of the atomic force microscope, so as to eliminate vibration and reduce The effect of actual load bearing and increasing the installation space
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[0069] Such as figure 1 As shown, a temperature changing device for an AFM translation stage includes a TEC component 5, a cooling device 4 for cooling the TEC component 5, a TEC controller 1 for controlling the cooling capacity of the TEC component 5, a TEC component 5 and a TEC controller 1 connected by electrical leads. The sample holder 7 carrying the sample 12 to be tested, the graphite fiber conduction belt that transfers the cold energy of the TEC component 5 to the sample holder 7, the heater 8 that heats the sample holder 7, the thermometer 9 that monitors the sample temperature and controls the temperature of the sample And the temperature controller 10 of variable temperature. The probe arm 13 of the commercial AFM device detects the sample 12 to be tested, and the sample 12 to be tested is placed on the sample holder 7, and the sample holder 7 is fixed on the translation platform 11 of the AFM device.
[0070] The cooling device 4 contains two independent nozzles...
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