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AFM equipment and temperature changing device and temperature changing method thereof

A temperature-variable device and equipment technology, which is applied in the direction of measuring devices, instruments, scanning probe microscopy, etc., can solve the problems of increasing the actual load of the displacement table, small temperature range, and reducing the resolution of the atomic force microscope, so as to eliminate vibration and reduce The effect of actual load bearing and increasing the installation space

Pending Publication Date: 2020-02-28
北京飞斯科科技有限公司
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The vibration of the cooling device installed on the TEC greatly reduces the resolution of the atomic force microscope; moreover, the cryogenic device also increases the actual load of the stage
In addition, due to the limitation of space, only single-stage TEC can be used, and the temperature range is small.

Method used

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  • AFM equipment and temperature changing device and temperature changing method thereof
  • AFM equipment and temperature changing device and temperature changing method thereof

Examples

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specific Embodiment approach

[0069] Such as figure 1 As shown, a temperature changing device for an AFM translation stage includes a TEC component 5, a cooling device 4 for cooling the TEC component 5, a TEC controller 1 for controlling the cooling capacity of the TEC component 5, a TEC component 5 and a TEC controller 1 connected by electrical leads. The sample holder 7 carrying the sample 12 to be tested, the graphite fiber conduction belt that transfers the cold energy of the TEC component 5 to the sample holder 7, the heater 8 that heats the sample holder 7, the thermometer 9 that monitors the sample temperature and controls the temperature of the sample And the temperature controller 10 of variable temperature. The probe arm 13 of the commercial AFM device detects the sample 12 to be tested, and the sample 12 to be tested is placed on the sample holder 7, and the sample holder 7 is fixed on the translation platform 11 of the AFM device.

[0070] The cooling device 4 contains two independent nozzles...

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Abstract

The invention provides a temperature changing device for an AFM displacement table, which comprises a temperature changing system and a sample holder, and is characterized in that the temperature changing system comprises a refrigerating system; the temperature changing device for the AFM displacement table further comprises a heat conduction piece; the refrigerating system is independent of the sample holder and is connected with the sample holder through the heat conduction piece. In this scheme, the refrigerating system is independent of the sample holder; and the heat conduction piece is adopted to transfer the cooling capacity of the refrigerating system to the sample holder, so that the split type work of the refrigerating system can be realized, the actual load of the test displacement table is greatly reduced, the vibration transferred to the sample to be tested by a cooling device during the heat dissipation of a TEC component is eliminated, and the installation space of the refrigerating system is increased. The invention further provides the AFM equipment applying the temperature changing device for the AFM displacement table, and a temperature changing method applying the AFM equipment.

Description

technical field [0001] The invention relates to the technical field of temperature-variable scanning probe imaging devices, in particular to an AFM device, a temperature-variable device, and a temperature-variable method. Background technique [0002] AFM is an atomic force microscope, which reflects the surface characteristics of the sample by detecting the van der Waals force between the miniature force-sensitive probe and the sample, and can provide a true three-dimensional surface map with atomic-level resolution. Near the room temperature range, it can be observed in the original state and physiological environment of the research object. [0003] TEC is a semiconductor cooler, which uses the Peltier effect of semiconductor materials to control the temperature by adjusting the magnitude of the current flowing through it. When the TEC is working, it will generate heat at the hot end, which needs to be dissipated by fans or circulating water, which causes certain vibrati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/24
CPCG01Q60/24
Inventor 黄社松杨威王凡刘一君刘云
Owner 北京飞斯科科技有限公司
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