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Double-piezoelectric-body side-by-side inertia-driven sheet-type rotary motor and scanning probe microscope

A technology of inertial drive and rotary motor, which is applied in the field of sheet-type rotary motors and piezoelectric motors. It can solve the problems of large thickness and size of rotary piezoelectric motors, and achieve the effect of simple and reliable control, simple control and improved stability.

Pending Publication Date: 2020-03-24
合肥中科微力科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problem of the large thickness of the existing rotary piezoelectric motor without reducing the thrust and increasing the radial dimension, and to realize the extreme condition of the space-limited tubular shape of the cutting-edge measuring instrument in the frontier scientific field For the following applications, a sheet-type rotary motor driven by dual piezoelectric bodies side by side and a scanning probe microscope mirror body made of it are provided

Method used

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  • Double-piezoelectric-body side-by-side inertia-driven sheet-type rotary motor and scanning probe microscope
  • Double-piezoelectric-body side-by-side inertia-driven sheet-type rotary motor and scanning probe microscope
  • Double-piezoelectric-body side-by-side inertia-driven sheet-type rotary motor and scanning probe microscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Example 1: A sheet-type rotary motor with double piezoelectric body side by side inertial drive

[0048] See attached figure 1 , the sheet-type rotary motor with dual piezoelectric bodies side by side inertial drive of the present invention includes a first piezoelectric body 2a, a second piezoelectric body 2b, and a base 1, and the first piezoelectric body 2a and the second piezoelectric body 2b It is fixed on the base in parallel with the deformation direction, and it is characterized in that the first piezoelectric body 2a and the second piezoelectric body 2b are both sheet-shaped stretchable piezoelectric bodies, which are arranged in the same thickness and coplanar to form a double-drive piezoelectric body. The sheet also includes a first pressing arm 3a, a second pressing arm 3b, a rotating disk 4, and a rotating shaft 5. One end of the rotating shaft 5 is perpendicular to the disk surface of the rotating disk 4 and is fixed at the center of the rotating disk 4. T...

Embodiment 2

[0052] Example 2: A sheet-type rotary motor driven by dual piezoelectric bodies side by side

[0053] In the above-mentioned embodiment 1, the side surfaces of the first piezoelectric body 2a and the second piezoelectric body 2b that are close to each other have a gap (see attached figure 2 ), these two gaps surround a synthetic hole pattern, which is called the shaft hole 6, and the shaft 5 passes through the shaft hole 6 to output torque to the outside. This structure is called a single-hole single-layer piezoelectric sheet-type double piezoelectric body side-by-side inertial-driven sheet-type rotary motor. The shaft passes through the shaft hole to output to the outside, which can limit the invalid displacement of the shaft and output a large torque to the outside as much as possible.

Embodiment 3

[0054] Example 3: A sheet-type rotary motor with double piezoelectric body side by side inertial drive

[0055] In the above-mentioned embodiment 2, a third piezoelectric body 7a, a fourth piezoelectric body 7b, a third pressing arm 8a, and a fourth pressing arm 8b are also included, and the third piezoelectric body 7a and the fourth piezoelectric body 7b According to the deformation direction parallel fixed on the base, the deformation directions of the first piezoelectric body 2a, the second piezoelectric body 2b, the third piezoelectric body 7a, and the fourth piezoelectric body 7b are the same, and the third piezoelectric body 7a and the fourth piezoelectric body The piezoelectric bodies 7b are sheet-shaped telescopic piezoelectric bodies, which are arranged in the same thickness and coplanar to form a second double-driven piezoelectric sheet, and the second double-driven piezoelectric sheet is parallel to the double-driven piezoelectric sheet and the double-driven piezoele...

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Abstract

The invention discloses a double-piezoelectric-body side-by-side inertia-driven sheet-type rotary motor. The motor comprises a first piezoelectric body, a second piezoelectric body, a base, a turntable sheet, a rotating shaft, a first pressing arm and a second pressing arm, the first piezoelectric body and the second piezoelectric body are fixed to the base in parallel in the deformation direction. The two piezoelectric bodies are both sheet-shaped telescopic piezoelectric bodies, and are arranged in an equal-thickness coplanar manner to form a dual-drive piezoelectric patch, the rotating shaft is perpendicular to the surface of the turntable sheet and fixed in the center of the turntable sheet to form a coaxial rotating structure, one end of the first pressing arm and one end of the second pressing arm are fixed to the free end of the first piezoelectric body and the free end of the second piezoelectric body respectively. The two pressing arms are parallel to each other, located on the same side of the dual-drive piezoelectric plate and parallel to the deformation directions of the two piezoelectric bodies, the other ends of the two pressing arms point to the base and elasticallyclamp the edge of the rotary plate, the deformation directions of the two piezoelectric bodies and the two pressing arms are parallel to the surface of the rotary plate, and the rotary shaft is an external torque output shaft. The motor is small in thickness, and is suitable for the application of the rotation of a space-limited tubular extreme condition tip measuring instrument.

Description

technical field [0001] The invention relates to a piezoelectric motor, in particular to a sheet-type rotary motor driven by dual piezoelectric bodies side by side and belongs to the technical field of piezoelectric positioners. Background technique [0002] Under the action of an external electric field, the piezoelectric material will produce mechanical deformation or mechanical stress in a certain direction. When the external electric field is reversed, the deformation or stress will also be reversed. This effect is called the inverse piezoelectric effect. Studies have found that piezoelectric ceramic materials produce very fine displacements under voltage, on the order of micro-nanometers, and the amplitude of vibration or expansion is very small, so piezoelectric ceramic materials have high positioning accuracy. However, the direct use of the inverse piezoelectric effect of the piezoelectric ceramic material results in deformations in the order of micro-nanometers, so it...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/10H02N2/12G02B21/00
CPCH02N2/101H02N2/12G02B21/002
Inventor 谢彩红陆轻铀
Owner 合肥中科微力科技有限公司
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