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Device for measuring three-dimensional shape of micro groove based on Dammann zone plate and working method

A technology of three-dimensional topography and measuring device, which is applied to measuring devices, optical devices, instruments, etc., can solve the problem that three-dimensional information is difficult to be guaranteed, and achieve the effects of large-scale mass production, cost reduction, and extension of focal depth.

Inactive Publication Date: 2020-03-27
JINAN UNIVERSITY
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  • Application Information

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Problems solved by technology

Through the CCD (Charge Coupled Device), the deformation information of the stripes can be collected, and then the three-dimensional shape data of the experimental object can be obtained. There are many methods for measuring the three-dimensional shape of tiny objects, but for the small size with deep grooves Objects, complete three-dimensional information is difficult to be guaranteed

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  • Device for measuring three-dimensional shape of micro groove based on Dammann zone plate and working method
  • Device for measuring three-dimensional shape of micro groove based on Dammann zone plate and working method
  • Device for measuring three-dimensional shape of micro groove based on Dammann zone plate and working method

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Embodiment Construction

[0029] The present invention will be further described in detail below in conjunction with the embodiments and the accompanying drawings, but the embodiments of the present invention are not limited thereto.

[0030] Such as figure 1 As shown, the micro-groove three-dimensional shape measurement device based on Damman zone plate includes: beam expansion collimation optical path module, Damman zone plate module, microgroove 7 to be tested, Fourier lens 9 and image collection module , the beam expander collimation optical path module produces parallel light through the Damman zone plate module to generate multiple light spots of equal intensity in the axial direction. The light and the reflected light are converged to the image collection module through the Fourier lens 9 for collection and processing.

[0031] The Damman zone plate module includes a Damman zone plate 5 and a focusing lens 6, the Damman zone plate 5 is coaxially placed with the focusing lens 6, and parallel lig...

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Abstract

The invention discloses a micro groove three-dimensional morphology measuring device based on a Dammann zone plate. The device comprises a beam expanding collimation light path module, a Dammann zoneplate module, a to-be-measured microgroove, a Fourier lens and an image collection module, parallel light generated by the beam expanding collimation light path module passes through the Dammann zoneplate module to generate a plurality of axial equal-intensity light spots, the light spots pass through the to-be-measured microgroove to generate reflected light, and the reflected light is convergedto the image collection module through the Fourier lens to be collected and processed.

Description

technical field [0001] The invention relates to the field of three-dimensional shape measurement, in particular to a small groove three-dimensional shape measurement device and working method based on a Damman zone plate. Background technique [0002] With the rapid development of industry, especially in the field of precision measurement, the optical non-contact three-dimensional measurement method for the measurement of the shape of tiny objects has gradually become a Research hotspots. [0003] One of the classic methods of optical non-contact 3D shape measurement is the grating projection phase measurement method, which belongs to the structured light method. It passes light through the grating and then projects it onto the surface of the object to be measured. The grating stripes are affected by the grooves of the tiny objects, and corresponding deformation occurs accordingly. Through the CCD (Charge Coupled Device), the deformation information of the stripes can be c...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/25
CPCG01B11/25G01B11/254
Inventor 叶宗浩周常河王津金戈李俊杰
Owner JINAN UNIVERSITY