Micro gyroscope based on planar coil in-plane detection

Abstract

The invention discloses a micro gyroscope based on planar coil in-plane detection. The gyroscope comprises a lower substrate, a bonding frame body which is arranged on the lower substrate, and an upper substrate which is arranged on the bonding frame body; the upper substrate comprises a support frame body, an outer mass block and an inner mass block, the outer mass block is arranged on the innerside of the supporting frame body; the inner mass block is arranged on the inner side of the outer mass block, a driving assembly is arranged at the corner of the inner side of the supporting frame body and connected with the outer mass block, a detection assembly is arranged at the corner of the inner side of the outer mass block and connected with the inner mass block, and a planar coil is arranged on the inner mass block. The micromechanical gyroscope is symmetrical in overall structure, high in output precision, reasonable and compact in structure, high in sensitivity and good in reliability, and the electromotive force effect generated by cutting magnetic induction lines through the planar coil is used for detecting weak offset force.

Description

technical field [0001] The invention relates to a micro-gyroscope based on in-plane detection of a planar coil, which belongs to the related field of micro-inertial navigation technology. Background technique [0002] Micromechanical gyroscope is a high-tech developed in the early 1980s for both military and civilian purposes. Compared with traditional gyroscopes, it has small size, low power consumption, low cost, easy mass production, high sensitivity, and overload resistance. It can be embedded in electronics, information and intelligent control systems, which greatly reduces the size and cost of the system, and greatly improves the overall performance, which is in line with the development direction of product informatization. The field of national defense has a wide application prospect, and more and more people pay attention to it. [0003] At present, the detection methods of micro-mechanical gyroscopes mainly include capacitance, piezoelectric and other detection me...

AI Technical Summary

Problems solved by technology

However, the parasitic capacitance inside the sensor will have a certain impact on the performance of the capacitance detection micro gyroscope. In order to reduce the influence of the parasitic capacitance, the detection accuracy and anti-interference ability of the interface circuit are put forward higher requirements.

The piezoelectric detection MEMS gyroscope has the characteristics of small size, direct output voltage signal, and easy compatibility with IC. However, the output voltage signal of the piezoelectric detection MEMS gyroscope is small, and the growth process of the piezoelectric material is complicated, so it cannot be operated at high temperature.

[0005] From the above analysis, it can be seen that the existing micro-mechanical gyroscopes have great defects, which limit the further development of micro-gyroscopes.

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