Bulk acoustic wave resonator having piezoelectric layer with insertion structure, filter, and electronic device

A technology of bulk acoustic wave resonators and resonators, applied in the fields of electronic equipment, bulk acoustic wave resonators, and filters

Pending Publication Date: 2020-04-14
TIANJIN UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the above traditional composite structure or single-layer insertion structure has limited improvement on the ener

Method used

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  • Bulk acoustic wave resonator having piezoelectric layer with insertion structure, filter, and electronic device
  • Bulk acoustic wave resonator having piezoelectric layer with insertion structure, filter, and electronic device
  • Bulk acoustic wave resonator having piezoelectric layer with insertion structure, filter, and electronic device

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Embodiment Construction

[0051] The technical solutions of the present invention will be further specifically described below through the embodiments and in conjunction with the accompanying drawings. In the specification, the same or similar reference numerals designate the same or similar components. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the general inventive concept of the present invention, but should not be construed as a limitation of the present invention.

[0052] figure 2 is a schematic top view of a bulk acoustic wave resonator according to an exemplary embodiment of the present invention. Such as figure 2 As shown, the bulk acoustic wave resonator includes a bottom electrode, a piezoelectric layer, a top electrode, and a compound annular insertion structure, and the top electrode may be covered with a passivation layer. The composite annular insertion structure is composed of an annular i...

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PUM

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Abstract

The present invention relates to a bulk acoustic wave resonator, and the resonator comprises a substrate; an acoustic mirror; a bottom electrode; a top electrode; and a piezoelectric layer, wherein anoverlapped area of the acoustic mirror, the bottom electrode, the piezoelectric layer and the top electrode in the thickness direction of the substrate is an effective area of the resonator; a composite insertion structure arranged along the edge of the effective area is arranged in the piezoelectric layer; a composite insertion structure including a first insertion layer and a second insertion layer, at least a portion of the first insertion layer overlapping the active region in a plan view of the resonator, and at least a portion of the first insertion layer overlapping the second insertion layer in a plan view of the resonator; the first insertion layer is made of a metal material and the second insertion layer is made of air or a dielectric material, or the first insertion layer is made of a dielectric material and the second insertion layer is made of air. The invention also relates to a filter and an electronic device.

Description

technical field [0001] Embodiments of the present invention relate to the field of semiconductors, and in particular to a bulk acoustic wave resonator, a filter, and an electronic device having one of the above components. Background technique [0002] Bulk acoustic wave filters have the advantages of low insertion loss, high square factor, and high power capacity. Therefore, they are widely used in contemporary wireless communication systems and are important components that determine the quality of radio frequency signals entering and leaving the communication system. The performance of a bulk acoustic wave filter is determined by the bulk acoustic wave resonator that constitutes it. For example, the resonant frequency of the bulk acoustic wave resonator determines the operating frequency of the filter, the effective electromechanical coupling coefficient determines the bandwidth of the filter, and the quality factor determines the filter insertion. loss. When the filter ...

Claims

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Application Information

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IPC IPC(8): H03H3/02H03H9/02H03H9/17H03H9/54
CPCH03H3/02H03H9/02015H03H9/17H03H9/54H03H9/02118H03H9/173H03H9/02157H03H9/02102H03H9/171
Inventor 杨清瑞庞慰张孟伦
Owner TIANJIN UNIV
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