Bulk acoustic wave resonator having piezoelectric layer with insertion structure, filter, and electronic device

A technology of bulk acoustic wave resonators and resonators, applied in the fields of electronic equipment, bulk acoustic wave resonators, and filters
CN111010104APending Publication Date: 2020-04-14TIANJIN UNIV +1
10 Cites 14 Cited by

Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
TIANJIN UNIV
Publication Date
2020-04-14

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The present invention relates to a bulk acoustic wave resonator, and the resonator comprises a substrate; an acoustic mirror; a bottom electrode; a top electrode; and a piezoelectric layer, wherein anoverlapped area of the acoustic mirror, the bottom electrode, the piezoelectric layer and the top electrode in the thickness direction of the substrate is an effective area of the resonator; a composite insertion structure arranged along the edge of the effective area is arranged in the piezoelectric layer; a composite insertion structure including a first insertion layer and a second insertion layer, at least a portion of the first insertion layer overlapping the active region in a plan view of the resonator, and at least a portion of the first insertion layer overlapping the second insertion layer in a plan view of the resonator; the first insertion layer is made of a metal material and the second insertion layer is made of air or a dielectric material, or the first insertion layer is made of a dielectric material and the second insertion layer is made of air. The invention also relates to a filter and an electronic device.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] Embodiments of the present invention relate to the field of semiconductors, and in particular to a bulk acoustic wave resonator, a filter, and an electronic device having one of the above components. Background technique

[0002] Bulk acoustic wave filters have the advantages of low insertion loss, high square factor, and high power capacity. Therefore, they are widely used in contemporary wireless communication systems and are important components that determine the quality of radio frequency signals entering and leaving the communication system. The performance of a bulk acoustic wave filter is determined by the bulk acoustic wave resonator that constitutes it. For example, the resonant frequency of the bulk acoustic wave resonator determines the operating frequency of the filter, the effective electromechanical coupling coefficient determines the bandwidth of the filter, and the quality factor determines the filter insertion. loss. When the filter ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More