High-low-pass distributed single-spectrum integrated spectral imaging chip structure
A spectral imaging and chip structure technology, applied in the field of spectral imaging, can solve the problems of difficulty in obtaining spectral information, difficult to meet the requirements of spectral detection in the field of material detection, and inability of image information to have three spectral characteristics. Sophisticated, easy-to-apply effects
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[0032] In order to make the purpose, content, and advantages of the present invention clearer, the specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0033] For the single-band spectral imaging microsystem integrated chip structure for specific application fields, the problems that affect the spectral accuracy due to the defects of the semiconductor deposition process are as follows: image 3 As shown, in the application process, it is necessary to use filters to filter out the influence of high step responses outside the central wavelength, and to perform spectral line correction on the output data of the spectral imaging microsystem to obtain accurate single-spectrum wavelength information. In order to simplify the application process of the single-band spectral imaging microsystem and further reduce the application cost, it is necessary to optimize the integrated ...
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