Microscope objective lens distortion test device and test method

Abstract

The invention discloses a microscope object lens distortion testing device and testing method, wherein the device includes: a laser confocal system and a spherical reflector, and the laser confocal system includes a light source, a collimating mirror, a beam splitter, a focusing mirror, and a pinhole imaging plate , Imaging microscope objective lens and CCD detector; wherein, the light beam emitted by the light source is collimated by the collimator and irradiated on the beam splitter, and the beam is refracted by the beam splitter and then passed through the microscope objective lens to be tested and then focused on the spherical reflector. The light beam is reflected back to the beam splitter through the spherical mirror, and then reflected to the focusing mirror through the beam splitting mirror, and then focused to the pinhole imaging plate by the focusing mirror for pinhole imaging. The image formed by the pinhole imaging plate is enlarged by the imaging microscope objective lens Received by CCD detector. The invention introduces a laser confocal system, and the measurement accuracy depends on the accuracy of the CCD detector. Compared with the traditional distortion test method, the measurement accuracy can be improved.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a microscope object lens distortion test device and a test method. Background technique [0002] The large field of view optical system can provide efficient utilization, but the increase of the field of view requires that the distortion of the optical system should be small enough, especially for high-precision systems such as microscopic objectives, which have a greater impact on the size of the distortion. Strict requirements, which put forward more stringent requirements for the test method of microscope objective lens distortion. At present, there are two main methods for measuring distortion, which are precision length measurement method and precision angle measurement method. The precision length measurement method refers to using a calibrated grid plate to image through the optical system under test, and using precision measuring instruments to measure the dist...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to overcome the defects of the prior art, in order to solve the problem of low measurement accuracy of the existing microscopic objective lens distortion testing method, a kind of microscopic objective lens distortion testing device and testing method are proposed, through laser confocal technology Measure the distortion of the microscope objective lens to improve the test accuracy

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