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Automatic laser cleaning device and method of OLED organic evaporation device

A technology of equipment automation and laser cleaning, which is applied to chemical instruments and methods, cleaning methods and utensils, and smoke and dust removal, etc. It can solve the problems of incomplete cleaning and difficult disposal of chemical waste liquid, and achieve the effect of fully automatic cleaning and rapid evaluation

Inactive Publication Date: 2020-04-28
安徽富乐德科技发展股份有限公司
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Problems solved by technology

[0003] The traditional cleaning method is to use organic solvents to remove the organic matter on the anti-sticking board, but this method will have the problems of incomplete cleaning and difficult disposal of chemical waste liquid

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  • Automatic laser cleaning device and method of OLED organic evaporation device

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Embodiment Construction

[0015] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0016] see figure 1 , the present invention provides a technical solution: an automatic laser cleaning method and device for OLED organic vapor deposition equipment, the device includes a main control device 13, a robot transmission device, a laser generator, a burner processing device, a residual component analysis device and a working Table and fixture device 1,

[0017] The main control device includes: robot walking program control software,...

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Abstract

The invention discloses an automatic laser cleaning method of an OLED organic evaporation device. The automatic laser cleaning method of the OLED organic evaporation device comprises a master controldevice, a robot transmission device, a laser generation device, a combustion product processing device, a residual component analyzing device and a workbench and clamp device. The robot device conducts laser scanning and radiation on the organic contaminants on the surface of an attachment preventing plate, so that the contaminants are heated and expanded or ablated, then thermal stress or thermalvibration is generated to enable the contaminants to be stripped or disengaged from the surface of an object to be cleaned, and full-automatic cleaning is achieved; and meanwhile, the residual component analyzing device conducts real-time and rapid evaluation on the cleaning effect.

Description

technical field [0001] The invention belongs to the technical field of OLED display equipment cleaning and regeneration, and in particular relates to an automatic laser cleaning equipment and method for OLED organic evaporation equipment. Background technique [0002] Based on Organic Light Emitting Diode (OLED) as a new type of pure solid-state display technology, it has the previous technical advantages and has been widely concerned about its unique advantages such as self-illumination, ultra-thin, fast response, and wide viewing angle. OLED Display technology has been extensively researched and produced. The preparation of the organic light-emitting layer in the OLED display screen usually adopts vacuum evaporation technology, that is, in the vacuum chamber equipment, the evaporation material in the crucible is heated to evaporate it and deposit it on the target substrate. It involves that after using the anti-sticking board for a period of time during the organic evapor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B7/00B08B15/00G01N21/3518
CPCB08B7/0042B08B15/007G01N21/3518
Inventor 张正伟刘宇航
Owner 安徽富乐德科技发展股份有限公司
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