Field programmable detector array

Abstract

Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements (501-503) including a first element (502) and a second element (503), and a switching region (3009) therebetween configured to connect the first element and the second element. The switching region may be controlled based on signals generatedin response to the sensing elements receiving electrons with a predetermined amount of energy.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to US Application 62 / 560,135, filed September 18, 2017, the entire contents of which are incorporated herein by reference. technical field [0003] The present disclosure relates generally to the field of detector arrays, and more particularly to field programmable detector arrays suitable for charged particle detection. Background technique [0004] Detectors are used in a variety of fields to sense physically observable phenomena. For example, electron microscopy is a useful tool for observing the surface topography and composition of samples. In charged particle beam tools used in microscopy, charged particles are directed at a sample and can interact with the sample in a variety of ways. For example, after impinging on the sample, secondary electrons, backscattered electrons, Auger electrons, X-rays, visible light, etc. may be scattered from the sample and detected by the detecto...

AI Technical Summary

Problems solved by technology

However, even such detector arrays suffer from the disadvantages that they are complex, difficult to manufacture, have large dead zones, and are difficult to scale.

Another group has complex arrangements that are flexible but difficult to manufacture and require large complex signal conditioning and signal routing circuits

The latter prevents further expansion of wafer inspection systems

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