Surface acoustic wave device
A surface acoustic wave and device technology, applied in electrical components, impedance networks, etc., can solve problems such as reduced durability of SAW devices
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[0038] In the 5G new air interface spectrum, 1-6GHz provides a good mix of coverage and capacity for 5G services, while the 3.3-3.8GHz frequency band provides a solid foundation for 5G initial commercial services. The 3.4-3.6GHz band in particular drives the economies of scale needed for low-cost devices. In order to operate in the 3.4-3.6GHz range (f 0 =3.5GHz,BW 3db =200MHz, the relative bandwidth is 5.7%) to obtain a wideband SAW filter for 5G service deployment, it is necessary to adopt a high electromechanical coupling coefficient k 2 (for example, k 2 >17%) piezoelectric structure. Although some ScAlN / diamond multilayer structures can exhibit sufficient electromechanical coupling (e.g., k 2 >17%), but the coupling coefficient of this structure generally decreases with the increase of the metal electrode thickness, so the degree of electromechanical coupling is low in practical applications. Although the ScAlN / diamond structure is superior to traditional SAW filters ...
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