Piezoelectric micropump and gas control device
A technology for control devices and micropumps, applied in pump control, pumps, pump components, etc., can solve the problems of low energy conversion efficiency of the output flow of piezoelectric micropumps, achieve the effects of small stiffness, increase output flow, and increase gas volume
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Embodiment 1
[0040] Such as Figure 1-9 As shown, this embodiment discloses a piezoelectric micropump, including a resonator 1 and a piezoelectric vibrator 2, the resonator 1 and the piezoelectric vibrator 2 are stacked, and the resonator 1 vibrates under the drive of the piezoelectric vibrator 2 to realize Air in and out.
[0041] The resonator 1 is plate-shaped as a whole, and the resonator 1 is sequentially divided into a plate part 11, a connecting part 12 and a resonance part 13 from outside to inside. In this embodiment, the outer contour of the plate part 11 is a square. It can be set to other shapes such as circles and rectangles. The connecting part 12 is annular, the outer end of the connecting part 12 is connected with the plate part 11, the inner end of the connecting part 12 is connected with the resonant part 13, and the connecting part 12 is distributed with air outlet holes 121, and the air outlet holes 121 can be set as many one, uniformly distributed on the connecting p...
Embodiment 2
[0056] Such as Figure 10 As shown, the present embodiment is basically the same as the first embodiment, the only difference is that the structure of the leakage valve 6 is different. The leakage valve 6 in this embodiment includes a valve casing 61, and a diaphragm structure 62 is arranged inside the valve casing 61. The diaphragm structure 62 divides the inner cavity of the valve casing 61 into an air inlet side and an air outlet side, and the valve casing on the inlet side There are two air inlets 611 on the 62, an air storage port 613 and an air outlet 612 are opened on the valve casing 62 on the air outlet side, and one air inlet 611 is aligned with the air outlet 612 so that the diaphragm structure 62 can be covered under the action of air pressure. Close the air outlet 612, the diaphragm structure 62 corresponding to the other air inlet 611 is provided with an air flow channel 623, and the air flow channel 623 is provided with a cantilever beam valve plate 63, and the ...
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