Multi-cell detector for charged particles
A technology of charged particles and detectors, applied in electrical components, electrical solid devices, circuits, etc., can solve the problem of increasing the difficulty of aligning detector arrays with electronic sensing elements, lack of different deflection directions of deflector arrays, and increasing the structure of deflector arrays. complexity, etc.
Active Publication Date: 2020-05-15
ASML NETHERLANDS BV
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Problems solved by technology
However, if a multi-beam SEM requires the use of a large number of primary electron beams and thus electronic sensing elements, the different deflection directions that a deflector array might provide are often lacking
Although the deflector array can be extended to provide more deflection directions, this not only increases the structural complexity of the deflector array, but also increases the difficulty of aligning the detector array with the electronic sensing elements.
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[0031] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. The following description refers to the accompanying drawings, wherein like numerals in different drawings indicate the same or similar elements unless otherwise indicated. The implementations set forth in the following description of the exemplary embodiments do not represent all implementations consistent with the disclosed subject matter. Rather, they are merely examples of apparatuses, systems and methods consistent with various aspects of the related subject matter as described in the appended claims. For example, although some embodiments are described in the context of systems utilizing electron beams, the disclosure is not limited thereto. Other types of charged particle beams can be applied as well. Still further, the devices, systems and methods for detection can be used in other imaging systems, such as optical imaging, light de...
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Abstract
A multi-cell detector includes a first layer (420) having a region (422) of a first conductivity type and a second layer (440) including a plurality of regions (444) of a second conductivity type. Thesecond layer may also include one or more regions (442) of the first conductivity type. The plurality of regions of the second conductivity type is partitioned from one another, perferably by the oneor more regions (444) of the first conductivity type of the second layer. The plurality of regions (444) of the second conductivity type may be spaced apart from one or more regions (442) of the first conductivity type in the second layer. The detector further includes an intrinsic layer (430,432) between the first and second layers.
Description
[0001] Cross References to Related Applications [0002] This application claims priority to US Application 62 / 566,102, filed September 29, 2017, the entire contents of which are incorporated herein by reference. technical field [0003] The present disclosure relates generally to charged particle detection, and more particularly to a multi-element detector of charged particles, and systems, methods and devices based thereon. Background technique [0004] In various fields, detectors are used to sense physically observable phenomena. For example, electron microscopy is a useful tool for observing the surface topography and composition of samples. Charged particle (eg, electron) beam microscopes with resolutions down to less than one nanometer, such as scanning electron microscopes (SEMs), can be used as practical tools for inspecting integrated circuit (IC) components with feature sizes, eg, less than 100 nanometers. Such charged particle beam tools may include a detector...
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IPC IPC(8): H01J37/244H01L27/146
CPCH01J37/244H01L27/14609H01L27/14665H01J2237/2446H01J2237/2441H01J37/28H01J2237/04756
Inventor 汪苏王勇新陈仲玮胡学让
Owner ASML NETHERLANDS BV