Correction method for interference measurement surface shape projection distortion of off-axis parabolic mirror

An off-axis paraboloid and distortion correction technology, which is applied in the direction of measuring devices, instruments, and optical devices, can solve the problems of cumbersome calibration of the position of the reference mask, risks in installation, and complex algorithm implementation, and achieve easy programming and detection. Low cost, simple and accurate calculation

Active Publication Date: 2020-05-22
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

For large-aperture aspheric surfaces, the production of reference masks and the calibration of their positions are cumbersome, and there are risks in their installation
Howe

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  • Correction method for interference measurement surface shape projection distortion of off-axis parabolic mirror
  • Correction method for interference measurement surface shape projection distortion of off-axis parabolic mirror
  • Correction method for interference measurement surface shape projection distortion of off-axis parabolic mirror

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[0037] The present invention will be further described below with reference to the accompanying drawings and examples, but the protection scope of the present invention should not be limited thereby.

[0038] Implementation notes:

[0039] Table 1 Key processing indicators of off-axis parabolic mirrors

[0040]

[0041] see figure 1 , the present invention corrects the off-axis parabolic mirror interferometry surface shape projection distortion method, comprises the following steps:

[0042]1) Use a three-coordinate measuring machine and a marker pen to mark the center position (0, 0) of the surface to be measured of the off-axis parabolic mirror; in order to avoid the lack of full-aperture measurement corner data affecting the calibration, at (105, 105) , (-105, 105), (-105, -105), (105, -105) four points for marking; among them, the interferometric resolution is 0.268mm, if 10pix is ​​taken, the size of the marking point is about 3mm;

[0043] 2) According to the optic...

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Abstract

The invention discloses a correction method for interference measurement surface shape projection distortion of an off-axis parabolic mirror. According to a known position relationship among an off-axis parabolic mother mirror, an off-axis sub-mirror and an interferometer, correction of the interference measurement projection distortion of the off-axis parabolic mirror can be simply, convenientlyand quickly realized through coordinate projection transformation calculation in combination with a corresponding calibration method, and a foundation is laid for processing of a high-precision off-axis paraboloid.

Description

technical field [0001] The invention relates to optical processing, in particular to a method for correcting projection distortion of an off-axis parabolic mirror (hereinafter referred to as off-axis parabolic mirror) for interferometric measurement. Background technique [0002] Chirped pulse amplification technology is the key technology to realize ultra-intensive and ultra-short laser pulse output. With the increasing application of off-axis parabolic mirrors, the processing technology is becoming more and more mature. Using high-quality large-diameter off-axis parabolic reflectors It is a feasible new method to fabricate the pulse compression grating in the high power chirped pulse amplification system by constituting the static interference field exposure light path with the mirror. Therefore, the processing quality of the off-axis parabolic mirror will ultimately affect the laser output capability. However, in the processing and testing process of off-axis parabolic m...

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Application Information

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IPC IPC(8): G01B9/02G01B21/04
CPCG01B21/045G01B9/02072
Inventor 胡晨邵建达魏朝阳吴令奇顾昊金
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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