Thin film transistor array substrate and manufacturing method thereof
A technology of thin film transistors and array substrates, applied in the field of liquid crystal display, can solve the problems of pixel electrode climbing and disconnection, and achieve the effect of improving quality
Active Publication Date: 2020-06-02
KUSN INFOVISION OPTOELECTRONICS
View PDF6 Cites 6 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0005] The purpose of the present invention is to provide a thin-film transistor array substrate and its manufacturing method, which can solve the problem of pixel electrode climbing and disconnection, and improve the quality of the thin-film transistor array substrate
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0034] In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the specific implementation, structure, features and effects of the present invention will be described in detail below in conjunction with the accompanying drawings and examples.
[0035] figure 1 is a schematic structural view of a thin film transistor array substrate in an embodiment of the present invention, Figure 2a-2o It is a schematic diagram of the manufacturing process of the thin film transistor array substrate in the embodiment of the present invention, image 3 It is a schematic diagram of the position of the bridging electrodes of the thin film transistor array substrate in the embodiment of the present invention, Figure 4 It is a schematic diagram of the position of the conductive lines of the thin film transistor array substrate in the embodiment of the present invention.
[0036] Such as figure 1 As shown, the manuf...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a thin film transistor array substrate and a manufacturing method thereof. The method comprises: depositing a first transparent conductive film; forming a second insulating layer covering the first transparent conductive film, patterning the second insulating layer and the first transparent conductive film in sequence, removing the second insulating layer and the first transparent conductive film at positions corresponding to contact holes of each TFT to form a common electrode and an insulating protection layer stacked on the common electrode, forming a third insulatinglayer covering the second insulating layer, and when the contact hole is opened, removing positions of the contact holes corresponding to the third insulating layer and the first insulating layer, namely only by etching off the positions of the contact holes. It can be guaranteed that the pixel electrodes are filled into the contact holes of the TFTs without wire breakage when patterns of the pixel electrodes are completed subsequently, and the quality of the thin film transistor array substrate is improved.
Description
technical field [0001] The invention relates to the technical field of liquid crystal display, in particular to a thin film transistor array substrate and a manufacturing method thereof. Background technique [0002] With the development of display technology, liquid crystal display panels (Liquid Crystal Display, LCD) are more and more popular due to their advantages of lightness and low radiation. The liquid crystal display panel includes an opposite color filter substrate (ColorFilter, CF) and a thin film transistor array substrate (TFT array) and a liquid crystal layer (LClayer) sandwiched between them. [0003] In the traditional TFT array substrate manufacturing process, after the common electrodes are patterned, an insulating layer covering the common electrodes is formed, and the pixel electrodes are patterned on the insulating layer to form strip-shaped pixel electrodes. In order to strive for further ultra-low energy consumption Highly competitive products with at...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/77H01L27/12
CPCH01L27/124H01L27/1225H01L27/1248H01L27/1259
Inventor 李治朝郑玮玮马晓旭张伟
Owner KUSN INFOVISION OPTOELECTRONICS