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Preparation method of superconducting Josephson junction device and superconducting Josephson junction device

A junction device, superconducting technology, applied in the field of micro-nano processing, can solve problems such as easy generation of gaps or fractures

Active Publication Date: 2020-06-05
NAT INST OF METROLOGY CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Based on this, it is necessary to provide a method for preparing a superconducting Josephson junction device and a superconducting Josephson junction device for the problem of easy generation of gaps or fractures caused by the vertical structure formed in the traditional preparation method of superconducting Josephson junction devices

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  • Preparation method of superconducting Josephson junction device and superconducting Josephson junction device
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  • Preparation method of superconducting Josephson junction device and superconducting Josephson junction device

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Embodiment Construction

[0033] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail through the following embodiments and in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present application, not to limit the present application.

[0034] The serial numbers assigned to components in this document, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any sequence or technical meaning. The "connection" and "connection" mentioned in this application all include direct and indirect connection (connection) unless otherwise specified. In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom"...

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Abstract

The invention provides a preparation method of a superconducting Josephson junction device and the superconducting Josephson junction device. The surface of an insulating structure prepared by the preparation method of the superconducting Josephson junction device has an inclination angle, so that when a lead layer is in contact with the insulation structure, the contact surface is inclined, and the problem that a vertical structure formed in a traditional superconducting Josephson junction device preparation method easily generates gaps or fractures is solved. At the moment, after an insulating layer of a growth layer of the lead layer is polished through a CMP technology, the insulating structure is formed, so that the side wall of the vertical structure formed in the traditional superconducting Josephson junction device preparation method can be ignored. Furthermore, through the preparation method of the superconducting Josephson junction device, the influence of a steep side wall formed by the vertical structure on the lead layer is effectively avoided, and the defect problems of gaps or breakage and the like in the connection of the lead layer are solved, so that the formationof defects in the connection layer of the superconducting Josephson junction device is inhibited, the quality of the device is improved, the yield is increased, and the service life of the device isprolonged.

Description

technical field [0001] The present application relates to the technical field of micro-nano processing, in particular to a preparation method of a superconducting Josephson junction device and a superconducting Josephson junction device. Background technique [0002] A Josephson junction is an electronic circuit consisting of two superconducting layers closely connected with a weakly connected layer, and the thickness of the weakly connected layer is generally on the order of nanometers. When the temperature is low enough, superconductors can exchange pairs of electrons across a potential barrier very quickly. Josephson junctions and devices containing Josephson junctions are mainly used in fields such as physics, chemistry, materials, geology, biology, and medicine. [0003] Among them, the preparation method of the superconducting Josephson junction device includes many micro-nano processing steps. However, in the process steps of making multiple vertically stacked Josep...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L39/24H01L39/02H01L39/22H10N60/01H10N60/80
CPCH10N60/805H10N60/12H10N60/0912
Inventor 李劲劲曹文会钟源钟青王雪深徐骁龙
Owner NAT INST OF METROLOGY CHINA
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