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Transverse differential dark field confocal microscopic measurement device and method thereof

A confocal microscopy and lateral differential technology, used in measurement devices, microscopes, optical devices, etc., can solve the problems of limited detection samples, low signal-to-noise ratio, low depth positioning accuracy, etc., to suppress environmental state differences, improve Effects of Lateral Sensitivity

Pending Publication Date: 2020-06-09
NANJING HENGRUI PRECISION INSTR CO LTD
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Problems solved by technology

Its ubiquitous shortcomings are low depth positioning accuracy, low signal-to-noise ratio, low detection efficiency, and limited detection samples.

Method used

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  • Transverse differential dark field confocal microscopic measurement device and method thereof

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Embodiment Construction

[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0034] The embodiment of the present invention discloses a lateral differential dark-field confocal microscopic measuring device, comprising: a ring light illumination module, a ring light scanning module and a differential confocal detection module;

[0035] The ring light illumination module includes: laser 1, beam expander 2, polarizer 1 3, polarization splitting film 4, quarter wave plate 5, axicon lens 6 and plane reflector 7 in sequence according to the d...

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Abstract

The invention discloses a transverse differential dark field confocal microscopic measurement device and a method thereof. The device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module. A sample reflection signal and a scattering signal are effectively separated through illumination beam shaping and complementary aperture shielding detection, and three-dimensional distribution information of defects such as nano-scale subsurface cracks and bubbles is obtained; the transverse sensitivity, linearity and signal-to-noise ratio of the measurement system are improved through differential confocal detection, and common-mode noise caused by environmental state difference, light source light intensity fluctuation, detector electrical drift and the like can be remarkably suppressed.

Description

technical field [0001] The invention relates to the technical field of optical precision measurement, and more specifically relates to a lateral differential dark field confocal microscopic measurement device and a method thereof. Background technique [0002] High-performance optical components and micro-electromechanical components are the core components of modern high-end equipment. In order to ensure their processing quality and service reliability, it is necessary to perform surface topography measurement and sub-surface defect detection. At present, there is no equipment at home and abroad that can simultaneously achieve the above Function. [0003] The existing non-destructive measurement technology of surface topography at home and abroad mainly includes: confocal microscopic measurement technology, white light interference microscopic measurement technology and zoom microscopic measurement technology. Compared with the other two techniques, the confocal microscopi...

Claims

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Application Information

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IPC IPC(8): G01N21/01G01B11/24G01N21/88G02B21/00G02B21/08
CPCG01N21/01G01N21/8806G01B11/24G02B21/0032G02B21/0048G02B21/08G01N2021/8848
Inventor 刘俭刘辰光陈刚
Owner NANJING HENGRUI PRECISION INSTR CO LTD