Integrated multifunctional air exhausting device for manufacturing photomultipliers and using method
A technology for photomultiplier tubes and exhaust devices, which is applied in the fields of electron multiplier details, machines with sequential working positions, climate sustainability, etc. Cleanliness and other issues to achieve the effect of reducing personnel costs, excellent optical performance, and improving work efficiency
Active Publication Date: 2020-06-09
NORTH NIGHT VISION TECH
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Problems solved by technology
When making photomultiplier tubes with traditional technology, baking and degassing, optical coating and cathode production are all performed on different equipment. During the circulation of each process, the glass spherical shell will be exposed to the atmosphere and re-adsorb the gas. The cleanliness of the glass substrate during the cathode production makes the impurity gas on the surface of the substrate affect the growth of the film layer, thereby affecting its optical performance
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[0017] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.
[0018] Aspects of the invention are described in this disclosure with reference to the accompanying drawings, which show a number of illustrated embodiments. Embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be appreciated that the various concepts and embodiments described above, as well as those described in more detail below, can be implemented in any of numerous ways, since the concepts and embodiments disclosed herein are not limited to any implementation. In addition, some aspects of the present disclosure may be used alone or in any suitable combination with other aspects of the present disclosure.
[0019] figure 1 A multifunctional exhaust device for making a photomultiplier tube is shown, including a bell jar 1, a bott...
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The invention belongs to the technical field of photomultipliers, and provides an integrated multifunctional air exhausting device for manufacturing photomultipliers and a using method. The integratedmultifunctional air exhausting device comprises a bell jar, a bottom plate, a rack, an electronic brushing system, a cathode system, a glow discharge system, a coating system, a reflectivity monitoring optical fiber, a vent valve, a molecular pump, a dry pump and an electric control system. With the integrated multifunctional air exhausting device for manufacturing the photomultipliers and the using method of the invention adopted, the baking degassing and final sealing of the photomultipliers can be completed on one piece of equipment in a high-vacuum environment; optical coating, glow oxidation, cathode manufacturing and electronic brushing are all carried out in the high-vacuum environment, so that various parts and a substrate are prevented from being exposed to the atmosphere in theprocess, pollution in a manufacturing process is reduced, and the optimal optical performance of the photomultipliers is guaranteed.
Description
technical field [0001] The invention relates to the field of photomultiplier tubes, in particular to an integrated device for baking and exhausting, optical coating, glow oxidation, photocathode production, tube core electronic cleaning, and sealing during the manufacturing process of photomultiplier tubes. device. Background technique [0002] The photomultiplier tube is a kind of vacuum tube, so the cleanliness of parts and substrates is very high. When making photomultiplier tubes with traditional technology, baking and degassing, optical coating and cathode production are all performed on different equipment. During the circulation of each process, the glass spherical shell will be exposed to the atmosphere and re-adsorb the gas. The cleanliness of the glass substrate during the cathode production makes the impurity gas on the surface of the substrate affect the growth of the film layer, thereby affecting its optical performance. Contents of the invention [0003] Th...
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IPC IPC(8): H01J9/48H01J43/04
CPCH01J9/48H01J43/04Y02P70/50
Inventor 孙建宁侯巍司曙光苏德坦金睦淳王兴超王丛杰王亮顾莹周帆
Owner NORTH NIGHT VISION TECH