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MEMS piezoelectric ultrasonic transducer with acoustic tube

A piezoelectric ultrasonic and transducer technology, which is applied in the direction of electrostatic sensors, sensors, electrical components, etc., can solve the problems of limited pMUT energy conversion efficiency, etc., to improve the utilization rate of sound energy, increase the power of sound radiation, and increase the sound pressure Effect

Active Publication Date: 2020-06-19
武汉敏声新技术有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Generally speaking, the current improvement of pMUT is mainly aimed at its electrode shape, adding materials outside, etc., but its effect on improving the energy conversion efficiency of pMUT is limited.

Method used

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  • MEMS piezoelectric ultrasonic transducer with acoustic tube
  • MEMS piezoelectric ultrasonic transducer with acoustic tube
  • MEMS piezoelectric ultrasonic transducer with acoustic tube

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Experimental program
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Embodiment Construction

[0030] Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0031] When a pMUT vibrates, it generates sound waves in opposite phases at the top and back simultaneously, but in a conventional pMUT, only half of the sound waves are utilized, and the sound waves generated at the back are wasted. By designing the pipeline structure to lead the sound generated from the back of the pMUT to the top, and recombining it with the sound generated at the top to radiate, the utilization rate of the sound generated by the pMUT can be greatly improved. Acoustic tubes are widely used in various musical instruments to amplify sound or tune sound waves. When the sound tube is set on the sound source, the sound tube is equivalent to the acoustic transmission line. According to the acoustic transmission line theory, adding a tube with a length of 1 / 4 odd multiples of the wavelength in front of the sound source can enhance the outp...

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PUM

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Abstract

The invention belongs to an MEMS ultrasonic transducer technology, in particular to an MEMS piezoelectric ultrasonic transducer with a sound tube. The MEMS piezoelectric ultrasonic transducer comprises an MEMS piezoelectric ultrasonic transducer body and at least one sound tube, wherein the interior of the sound tube is a silicon substrate of a cavity structure, wherein each sound tube comprises at least three sound wave conduits, and the first sound wave conduit and the third sound wave conduit formed by etching and bottom polishing after piezoelectric lamination is deposited on the CSOI wafer are bonded with the second sound wave conduit formed by etching on the Si wafer. The sound tube can conduct sound waves generated by the back of the MEMS piezoelectric ultrasonic transducer to the top of the MEMS piezoelectric ultrasonic transducer, and due to the sound amplification effect of the sound tube, the sound waves transmitted from the sound tube are enhanced. Meanwhile, sound waves generated by the back of the MEMS piezoelectric ultrasonic transducer transmitted by the sound tube and sound waves generated by the top of the MEMS piezoelectric ultrasonic transducer can be superposedand transmitted, so that the intensity of the sound waves generated by the ultrasonic transducer is further enhanced. According to the transducer, the intensity of sound waves generated by the MEMS ultrasonic transducer can be enhanced, and the energy conversion efficiency of the MEMS piezoelectric ultrasonic transducer is improved.

Description

technical field [0001] The invention belongs to the technical field of MEMS ultrasonic transducers, in particular to a MEMS piezoelectric ultrasonic transducer with a sound tube. Background technique [0002] An ultrasonic transducer is a transducing element that can be used to both transmit and receive ultrasonic waves. When working in the transmitting mode, the electric energy is converted into the vibration of the transducer through electrostatic force or inverse piezoelectric effect to radiate sound waves; when working in the receiving mode, the sound pressure acts on the surface of the transducer to vibrate, and the transducer The vibration is then converted into an electrical signal. At present, the most widely used ultrasonic sensors are mainly based on bulk piezoelectric transducers, which mainly use the thickness vibration mode of piezoelectric ceramics to generate ultrasonic waves. Since the resonance frequency of the thickness mode is only related to the thicknes...

Claims

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Application Information

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IPC IPC(8): H04R19/00
CPCH04R19/00
Inventor 孙成亮吴志鹏王磊朱伟胡博豪林炳辉占惠花
Owner 武汉敏声新技术有限公司
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