The invention discloses an
impedance matching adjusting method and device applied to a
radio frequency power supply, and the method comprises the steps: collecting incident and
reflected waves between an
impedance matching network and a load, determining whether the impedance is matched or not according to the amplitude and
phase angle of the
incident wave and the reflected wave, and if not, obtaining an amplitude difference
voltage and a
phase angle difference
voltage; acquiring a
control signal according to the amplitude difference
voltage and the
phase angle difference voltage, and inputting the
control signal to a controlled
current source to obtain a control current; increasing the magnetic induction intensity of a
magnetic core by the control current, so as to increase the saturation degree of the
magnetic core and influence the effective magnetic
conductivity of the
magnetic core is influenced, so that the
inductance value of an
inductor wound around the magnetic core in the
impedance matching network is changed, and the impedance of the impedance matching network is further changed. The technical problems that in the prior art, a
servo stepping motor is used or the number of parallel capacitors is controlled to change the
capacitance value in a matching box to achieve impedance matching, cost is high, the adjustable range is small, the adjusting process is not smooth enough, and the design requirement for the
capacitance value is high are solved.