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A bulk acoustic wave resonator, ultra-narrowband filter, duplexer and multiplexer

A technology of bulk acoustic wave resonators and filters, applied in impedance networks, electrical components, etc.

Active Publication Date: 2021-04-16
ROFS MICROSYST TIANJIN CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such an ultra-narrowband filter has a relative bandwidth of only two ten-thousandths. If the conventional design method is used, the effective bulk acoustic wave resonator is required. About 5 / 10,000, such a small effective is impossible to make

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  • A bulk acoustic wave resonator, ultra-narrowband filter, duplexer and multiplexer
  • A bulk acoustic wave resonator, ultra-narrowband filter, duplexer and multiplexer
  • A bulk acoustic wave resonator, ultra-narrowband filter, duplexer and multiplexer

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Embodiment Construction

[0033] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0034] At present, in some special applications, some special performance requirements are put forward for the filter. For example, in addition to the small size of the filter, the communication bandwidth of the filter is required to be only a few hundred KHz, and the requirement for adjacent band suppression is also very high. 60dB of out-of-band rejection is required. For example, a GPS user requires a filter with a center frequency of 1.5754GHz, a communication bandwidth of 250KHz, and a near-band suppression of 60dB. BAW resonators are required for effective About 5 / 10,000, such a small effective is not possible.

[0035] For the bulk acoustic wave filter with ladder topology, the existing method to realize the narrowband filter is: connect a capacitor in parallel with the bulk acoustic wave resonator in series or connect a capacitor in series ...

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Abstract

The invention provides a bulk acoustic wave resonator, an ultra-narrow-band filter, a duplexer and a multiplexer, and utilizes the special resonance characteristics of the bulk acoustic wave resonator to realize an ultra-narrow-band filter; the bulk acoustic wave resonator includes a silicon substrate, formed The lower electrode on the silicon substrate, the silicon dioxide temperature compensation layer formed on the lower electrode, the piezoelectric layer formed on the silicon dioxide temperature compensation layer, and the piezoelectric layer formed on the piezoelectric layer The upper electrode; the ultra-narrowband filter includes a series branch and a plurality of parallel branches, and the series branch includes at least four of the above-mentioned bulk acoustic wave resonators or capacitors, which are connected in series between the input and output ports of the filter Each of the parallel branches includes at least one bulk acoustic wave resonator mentioned above.

Description

technical field [0001] The invention relates to the technical field of bulk acoustic wave filters, in particular to a bulk acoustic wave resonator, an ultra-narrowband filter, a duplexer and a multiplexer. Background technique [0002] With the rapid development of wireless communication technology, many radio frequency devices are widely used in the field of communication. For example, there will be a large number of filters and duplexers used in personal mobile terminals such as mobile phones, mainly used to filter out unnecessary radio frequency signal to improve the performance of the transmit or receive path. At the same time, in addition to high requirements on the performance of filters and duplexers, high requirements are also placed on volume size, and bulk acoustic wave filters can just meet the requirements. BAW resonators use the piezoelectric effect of piezoelectric crystals to generate resonance. Since the resonance is generated by mechanical waves rather tha...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/00H03H9/72H03H9/46
CPCH03H9/00H03H9/46H03H9/72
Inventor 庞慰徐利军柴竹青
Owner ROFS MICROSYST TIANJIN CO LTD