A microfluidic device based on a phased array ultrasonic transducer

Abstract

The invention relates to a microfluidic control device based on a phased array ultrasonic transducer, comprising a frame, a phased array ultrasonic transducer, a funnel and a lifting assembly, wherein the phased array ultrasonic transducer is provided with a plurality of ultrasonic The sending / receiving element, the ultrasonic sending / receiving element is arranged in the form of an array; the funnel is filled with fluid; The ultrasonic transducer or funnel is set on the lifting assembly, so that the relative distance between the phased array ultrasonic transducer and the funnel can be adjusted, so as to adjust the ultrasonic focus position of the ultrasonic waves emitted by the phased array ultrasonic transducer in the funnel . Compared with the prior art, the present invention can make the sound wave energy converge at the position corresponding to the volume of the droplet, block the interaction force between the droplets, make the droplet fall off, and then realize the precise drop speed and size of the droplet. control.

Description

technical field [0001] The invention relates to a microfluidic device, in particular to a microfluidic device based on a phased array ultrasonic transducer. Background technique [0002] At present, the development trend of miniaturization and intelligentization of electronic devices has led to the use of adhesive connections in microelectronic packaging. Accurate, trace and rapid distribution of high-viscosity colloidal materials such as adhesives and underfills Indispensable technological means in development. [0003] The traditional dispensing system, such as mechanical extrusion, is limited by the working principle and driving mode, and has disadvantages such as slow dispensing speed and large glue droplet volume, and its glue dispensing accuracy and speed are difficult to meet the requirements of accurate and fast dispensing . With the rapid development of integrated circuits, the demand for colloid viscosity in the industry is getting higher and higher, and the volu...

AI Technical Summary

Problems solved by technology

This method can meet the performance requirements of rapid colloid distribution, but due to the hysteresis and nonlinear characteristics of the piezoelectric element, the output accuracy is seriously affected. When the distribution colloid changes, the distribution parameters need to be re-calibrated manually, and it is difficult to complete the rapid distribution of different desired volumes and The placement tasks for chips of different sizes and packaging types have restricted the development of colloid distribution in the field of microelectronic packaging to micro-accurate, volume-controllable, and rapid distribution operations.

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