Scanning nozzle cleaning tank and scanning nozzle cleaning method

Abstract

The invention discloses a scanning nozzle cleaning tank and a scanning nozzle cleaning method. The scanning nozzle cleaning tank comprises a tank body and an upper cover plate, wherein the tank body and the upper cover plate are sealed by a corrosion-resistant sealing ring; the tank body is provided with at least four reagent storage tanks; the upper cover plate is correspondingly provided with nozzle inlets and outlets of the same number as the reagent storage tanks; each reagent storage tank is provided with a liquid inlet, an overflow port and a liquid level sensor; the bottom of each reagent storage tank is provided with a liquid discharge port; and each liquid level sensor is used for detecting whether the liquid level of a reagent in the corresponding reagent storage tank is in an empty state or a full state. The tank body layout is more reasonable, the structure is more compact, the use cost is lower, pollution can be effectively reduced, and a reasonable use method is providedto improve productivity.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a scanning nozzle cleaning tank and a cleaning method. Background technique [0002] Driven by Moore's Law, the 14nm generation of high-performance, low-power devices dominated by FinFETs (Fin Field Effect Transistors) has already entered our lives, but few people know that a large number of new chemicals need to be introduced to manufacture such powerful devices. Elements, fewer people know that because the introduction of "new" elements has made it extremely difficult to monitor the pollution of chip processing plants. Because each element has different effects on silicon-based devices, some must be added to achieve functions, and some are unintentionally introduced to reduce or kill the pollution source of the device, so all possible elements must be strictly monitored. In the periodic table of elements, metal elements account for the majority, and their active chemica...

AI Technical Summary

Problems solved by technology

However, fluorine-containing plastics are hydrophobic. If they encounter a liquid with a slightly higher surface tension, such as a water-based solution, it will not be able to complete normal overflow or fast drainage in a small tank.

In addition, generally fluorine-containing plastics are non-transparent, and it is difficult to detect the liquid level of the tank

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