Coupling system of vacuum atomic force microscope and vacuum atomic force microscope

Abstract

The invention provides a coupling system of a vacuum atomic force microscope and a vacuum atomic force microscope. The coupling system includes: a vacuum chamber; an excitation light source, located outside the vacuum chamber, emitting excitation laser light for vibrating the probe; a detection light source, located outside the vacuum chamber, emitting detection laser light for detecting the deflection information of the probe; A transmission device, partly arranged outside the vacuum chamber, and partly arranged outside the vacuum chamber, the light transmission device can receive the excitation laser and the detection laser, and the light transmission device can also transmit the probe reflection The excitation laser and the detection laser are used to deflect the excitation laser; the photoelectric position converter is used to receive the detection laser and calculate the force on the probe according to the detection laser. Realize reliable measurement in a vacuum environment, reduce noise in the measurement process, and ensure accurate measurement results. At the same time, the structure is simple, which can reduce the complexity of the coupling system.

Description

technical field [0001] The invention relates to the technical field of measurement, in particular to a coupling system of a vacuum atomic force microscope and a vacuum atomic force microscope. Background technique [0002] Atomic Force Microscope (AFM) is an important measurement, characterization and manipulation tool in many nanotechnology fields such as physics, materials and biology. AFM technology has a variety of operation modes such as contact, non-contact and dynamic AFM technology. Since the invention of dynamic AFM technology, further improving resolution and reducing noise has been the direction of its development. Therefore, this also puts forward higher requirements for the probe drive and signal detection of atomic force microscopy. The more common probe excitation method is mainly piezoelectric excitation, and the signal detection generally uses photoelectric detection. However, due to the presence of a large number of spurious noise peaks in the response sp...

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Problems solved by technology

[0004] Based on this, it is necessary to provide a vacuum atomic force microscope coupling system and a vacuum atomic force microscope that can measure in a vacuum environment and have a simple structure in view of the current problem that the pollution in the atmosphere affects the measurement accuracy of the atomic force microscope.

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