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Surface microstructure measurement sensor

A technology for measuring sensors and microscopic topography, which is applied in the direction of measuring devices, instruments, non-electric variable control, etc., can solve the problems affecting the overall accuracy of the roughness measuring instrument, and achieve the effect of small friction and improved accuracy

Pending Publication Date: 2020-06-30
NAT INST OF METROLOGY CHINA
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Problems solved by technology

[0004] The stylus roughness meter includes lever type and vertical type according to the measurement structure. Due to its measurement structure characteristics, the lever stylus roughness meter has an inevitable cosine error when measuring the fluctuation of the surface height. Affect the overall accuracy of the roughness measuring instrument. Although this system error can be compensated by some means such as angle sensors, it is still an inevitable error in the field of nanometer measurement, and it will be used when evaluating the overall uncertainty of the instrument. introduce more uncertainty

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Embodiment Construction

[0038] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0039] The purpose of the present invention is to provide a surface micro-topography measurement sensor for improving measurement accuracy.

[0040] In order to make the above objectives, features and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0041] figure 1 It is the structure dia...

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Abstract

The invention discloses a surface microstructure measurement sensor. The sensor is used for measuring the morphology of the surface of a to-be-measured workpiece, and comprises: a contact pin used formeasuring the microstructure; a contact pin shaft, wherein one end of the contact pin shaft is connected with the contact pin, and the contact pin shaft is used for moving up and down along with thecontact pin when the contact pin measures the microstructure; a magnetic constant force module connected with the other end of the contact pin shaft and used for adjusting the measuring force betweenthe contact pin and the to-be-measured workpiece; a contact pin shaft air floating module surrounding the periphery of the contact pin shaft and used for suspending the contact pin shaft; and a displacement measurement module arranged over the contact pin shaft and used for measuring the displacement of the contact pin shaft in the vertical direction. An air gap is formed in the outer surface of the contact pin shaft through the contact pin shaft air floating module, so it is ensured that the contact pin shaft is suspended and has minimum friction, and the contact pin measurement precision isimproved. The measuring force between the contact pin and the to-be-measured workpiece can be adjusted through the magnetic constant force module, so that the contact pin transmits the surface topography of the workpiece to the sensor more truly.

Description

Technical field [0001] The invention relates to the field of surface micro-topography measurement, in particular to a surface micro-topography measurement sensor. Background technique [0002] The surface microtopography has always been a hot spot in the field of precision engineering. Among them, surface roughness is a technical indicator used to describe the microscopic geometric shape error of parts, and it is also an important method for evaluating mechanical processing technology. In the manufacturing fields of precision machinery, instrumentation, ultra-precision machining, etc., surface roughness is an important parameter, and its measurement theory research and measurement instrument research and development have always been the focus of people's attention. [0003] Roughness measuring instruments can be divided into stylus type and non-stylus type according to the measurement principle. The measuring principle of the traditional stylus type roughness measuring instrument...

Claims

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Application Information

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IPC IPC(8): G01B11/30G05D15/01
CPCG01B11/30G05D15/01
Inventor 施玉书张树皮磊史舟淼高思田李伟李琪李适黄鹭
Owner NAT INST OF METROLOGY CHINA
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