Vertical surface roughness measuring head and surface roughness instrument

Abstract

The invention discloses a vertical surface roughness measuring head and a surface roughness instrument. The vertical surface roughness measuring head comprises a fixed frame, a movable frame, a displacement measuring module, a probe rod, a contact probe and a guide device, wherein the movable frame is vertically connected to the fixed frame in a sliding manner, the probe rod is arranged on the movable frame, the guide device is arranged on a bottom plate of the movable frame, the guide device can be used for vertically guiding the probe rod to prevent the probe rod from swinging, the contact probe is fixedly arranged at the bottom end of the probe rod, the probe rod penetrates through the guide device, the contact probe penetrates through the bottom plate of the movable frame, and the displacement measuring module is used for measuring the moving distance of the probe rod in the vertical direction. The surface roughness instrument comprises a frame body, a moving device and the vertical surface roughness measuring head. According to the invention, the contact probe and the probe rod are always perpendicular to the surface of a workpiece in the measurement process under the action of the guide device, the operation is simple and convenient, and the measurement accuracy is high.

Description

technical field [0001] The invention relates to the technical field of measuring equipment, in particular to a vertical surface roughness measuring head and a surface roughness meter. Background technique [0002] Surface roughness is a technical index used to describe the micro-geometric shape error of parts, and it is also an important method to evaluate machining process. In precision machinery, instrumentation, ultra-precision machining and other manufacturing fields, surface roughness is a parameter that is valued, and its measurement theory research and measurement instrument research and development have always been the focus of people's concern. [0003] In the prior art, a lever-type stylus-type roughness measuring instrument is generally used. The measurement principle is to make the stylus fluctuate with the surface of the workpiece to be measured in the vertical direction after the stylus moves relative to the surface of the workpiece to be measured, and then use...

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Problems solved by technology

[0003] In the prior art, a lever-type stylus-type roughness measuring instrument is generally used. The measurement principle is to make the stylus fluctuate with the surface of the workpiece to be measured in the vertical direction after the stylus moves relative to the surface of the workpiece to be measured, and then use the sensor to measure Such tiny fluctuations can finally obtain the surface information of the measured workpiece after signal processing, but due to the characteristics of the measuring structure of the lever stylus roughness measuring instrument, there is an inevitable cosine error when measuring the fluctuation of the surface height, which ultimately affects The overall accuracy of the roughness measuring instrument. Although this system error can be compensated by some means such as angle sensors, it is still an unavoidable error in the field of nanometer measurement, and it will be introduced when evaluating the overall uncertainty of the instrument. More uncertainty, more system noise

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