Straight slot PCD drill bit with cooling holes

Abstract

The invention discloses a straight slot PCD drill bit with cooling holes. The straight slot PCD drill bit is used for drilling of semiconductor wafers. The straight slot PCD drill bit includes a drillshank and a drill rod formed by a combination of an extension rod and a drill point made of a PCB composite material, the drill shank is provided with at least one cooling holes, wherein cooling water can be introduced into the cooling holes, outlets of the cooling holes face the drill rod so that the cooling water flowing from the outlets of the cooling holes can cool the drill rod, the drill rod is provided with a straight groove for chip removal, and an apex angle is formed at the end of the drill point. The drill bit uses the straight groove instead of a spiral chip removal groove in a traditional PCD drill bit, fine cuttings generated during the grinding of the semiconductor wafers by the drill bit can be smoothly discharged out of the holes through the straight groove, so that the blockage due to sticking of the cuttings to the inner part of the groove is avoided. Meanwhile, by forming the cooling holes in the drill shank, the cooling water can be introduced into the cooling holes, the cooling water can be sprayed out from the outlets of the cooling holes toward the drill rod, so that the drill rod is cooled and prevented from overheating, frequent extraction for cooling isavoided, the drilling operation efficiency is improved, and the processing cycle is reduced.

Description

technical field [0001] The invention relates to the technical field of drill bits, in particular to a straight groove PCD drill bit with cooling holes. Background technique [0002] In the prior art, when the semiconductor wafer is drilled, the multilayer semiconductor wafers are mostly stacked together, and then the multilayer semiconductor wafer is drilled at the same time using the PCD drill bit, and when the multilayer semiconductor wafer is drilled at the same time, it is necessary to It will lead to the problem of serious heating of the drill rod part of the drill bit. In the prior art, the drill rod is usually air-cooled by frequently pulling the drill bit away from the hole on the semiconductor wafer, because the drill bit needs to be pulled out frequently for cooling, thus causing drilling The efficiency is greatly reduced, seriously affecting the processing cycle. In addition, in the prior art, when the semiconductor wafer is drilled, the PCD drill bit mainly real...

AI Technical Summary

Problems solved by technology

[0003] Aiming at the deficiencies of the prior art, the present invention provides a straight groove PCD drill bit with cooling holes, which mainly solves the problem that the existing PCD drill bit needs to be frequently withdrawn for cooling during the semiconductor wafer drilling operation, which causes the semiconductor wafer drilling The hole operation efficiency is low, and the existing PCD drill bit with helical flute is in the process of drilling semiconductor wafers, the fine powder is easy to stick to the chip flute, which affects heat dissipation and even causes technical problems such as blockage of the chip flute.

Images