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Magnetic sensor based on surface acoustic waves and magnetic torque effect, and preparation method

A technology of surface acoustic wave and magnetic sensor, applied in the field of magnetic sensor, can solve the problem of low sensitivity and achieve the effect of improving sensitivity, reducing loss and improving sensitivity

Active Publication Date: 2020-07-10
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the sensitivity of current surface acoustic wave magnetic sensors is far lower than that of bulk acoustic wave magnetic sensors.

Method used

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  • Magnetic sensor based on surface acoustic waves and magnetic torque effect, and preparation method

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Embodiment 1

[0039] see figure 1 , a magnetic sensor based on surface acoustic waves and magnetic torque effects and a preparation method thereof, comprising a substrate 1, a cantilever beam 2 is fixed on the substrate 1; a surface acoustic wave generator 3 is bonded on the cantilever beam 2; a surface acoustic wave generator The device 3 consists of piezoelectric material 4 and interdigitated electrodes 5 . A magnet 6 is placed at the free end of the cantilever beam 2 .

[0040] The base body 1 is the fixed base of the cantilever beam 2 . The cantilever 2 is copper foil. The surface acoustic wave generator 3 is a single port. Piezoelectric materials are piezoelectric single crystals The interdigital electrode is composed of an electrode film Cu and an adhesion layer Ta, the thickness of the Cu film is 100nm, and the thickness of the Ta film is 5nm. The magnet material is NdFeB, and the number is two pieces, stacked up and down.

[0041] The magnetic sensor based on the surface acou...

Embodiment 2

[0048] A magnetic sensor based on surface acoustic wave and magnetic torque effect and its preparation method, comprising a substrate 1, on which a cantilever beam 2 is fixed; a surface acoustic wave generator 3 is bonded on the cantilever beam 2; a surface acoustic wave generator 3 consists of piezoelectric material 4 and interdigital electrodes 5 . A magnet 6 is placed at the free end of the cantilever beam 2 .

[0049] The base body 1 is the fixed base of the cantilever beam 2 . The cantilever beam 2 is stainless steel foil. The surface acoustic wave generator 3 has a delay line structure. The piezoelectric material is piezoelectric thin film ZnO with a thickness of 5 μm. The interdigitated electrode is composed of an electrode film Al and an adhesion layer Ta, the thickness of the Al film is 100nm, and the thickness of the Ta film is 5nm. The magnet material is NdFeB, and the number is two, which are stacked in a parallel structure.

[0050] The preparation technology...

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Abstract

The invention discloses a magnetic sensor based on surface acoustic waves and a magnetic torque effect, and a preparation method thereof. The magnetic sensor comprises a fixed base, a surface acousticwave generation structure, a cantilever beam structure and a magnet, wherein one end of the cantilever beam structure is arranged at the top part of the fixed base, and the magnet is arranged at theother end of the cantilever beam structure; and the surface acoustic wave generating structure is arranged on the surface of the cantilever beam structure. According to the surface acoustic wave magnetic sensor, the torque effect is introduced, the influence of a magnetic field on the center frequency of the surface acoustic waves is amplified, and the sensitivity of the surface acoustic wave magnetic sensor is effectively improved. The novel surface acoustic wave magnetic sensor can improve the sensitivity of the magnetic sensor by nearly ten times, and does not need an additional direct-current bias magnetic field, so that the structure of the sensor is simpler, and the loss is reduced.

Description

technical field [0001] The invention belongs to the technical field of magnetic sensors, in particular to a magnetic sensor and a preparation method based on surface acoustic wave and magnetic torque effects. Background technique [0002] With the development of the Internet of Things, high-sensitivity, low-loss magnetic sensors are increasingly needed in various occasions. Acoustic-based magnetic sensors provide a feasible path for the development of high-sensitivity magnetic sensors. At present, magnetic sensors based on acoustic waves are divided into two categories, one is surface acoustic wave magnetic sensors, and the other is magnetic sensors based on bulk acoustic waves. The magnetic sensor based on the bulk acoustic wave requires a deep silicon etching process in the process, which increases the difficulty and cost of manufacturing. When the frequency is less than 2GHz, the surface acoustic wave magnetic sensor has been extensively studied due to its simple proces...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/00G01R33/038G01R33/10
CPCG01R33/0011G01R33/0052G01R33/038G01R33/10
Inventor 刘明胡忠强周子尧王志广吴金根程苗苗
Owner XI AN JIAOTONG UNIV