Thin-film magnetic sensor with groove structures

A magnetic sensor and thin film technology, applied in the field of sensors, can solve the problems of size and change degree limitation, particle type or component content adjustment, affecting sensor sensitivity performance, etc., to achieve the effect of improving sensitivity

CN111443314AInactive Publication Date: 2020-07-24SHANGHAI JIAO TONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2020-07-24
Estimated Expiration
Not applicable · inactive patent

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Abstract

A thin-film magnetic sensor with groove structures is characterized by comprising two rectangular magnetic films and a rectangular spiral coil arranged between the two rectangular magnetic films, wherein the rectangular spiral coil adopts an overall planar spiral structure, and is spirally wound out from a certain position of the rectangular interior in the clockwise or anticlockwise direction; aplurality of rectangular grooves are formed on the inner surface of each rectangular magnetic film and are perpendicular to the sensing direction of the rectangular magnetic film (namely the directionof a magnetic field to be tested, which is usually the length direction of the thin film), and the number of the rectangular grooves is the same as the number of the turns of the rectangular spiral coil; and the rectangular grooves of one rectangular magnetic film are opposite to the rectangular grooves of the other rectangular magnetic film, so that conductors in the rectangular spiral coil, which are perpendicular to the sensing direction, are embedded in the rectangular magnetic films. The thin-film magnetic sensor with the groove structures provided by the invention has the advantage thatthe thin-film magnetic sensor is more sensitive to an external magnetic field.
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Description

technical field

[0001] The invention relates to a sensor, especially a thin-film magnetic sensor with a groove structure. Background technique

[0002] Magnetic sensors are one of the most widely used sensors, and can directly or indirectly measure many physical, chemical, biological and other parameters through magnetic field measurement. The planar spiral coil and the soft magnetic film made of high magnetic permeability soft magnetic material can be combined to form a magnetic sensor with a thin film coil structure.

[0003] The sensing process of the external magnetic field of the thin film magnetic sensor can be divided into two stages:

[0004] In the first stage, in the thin film coil, the effective magnetic permeability of the soft magnetic film μ eff External magnetic field H app the response to:

[0005] According to the magnetic properties (magnetization curve) of the soft magnetic material, in the process of magnetization, the effective permeability μ of the ...

Examples

Embodiment

[0049] Such as image 3 Schematic diagram of the structure of the rectangular spiral coil;

[0050] The rectangular spiral coil 1 has a rectangular planar spiral structure as a whole, and the wires in the two vertical directions are composed of a conductor, and the width of each conductor is d;

[0051] The corners of the rectangular spiral coil 1 are vertically connected by a conductor 1 - 2 parallel to the long side direction of the magnetic film 2 and a conductor 1 - 1 in the short side direction.

[0052] The conductors constituting the rectangular spiral coil 1 are divided into two parts: a conductor 1-1 parallel to the short-side direction of the magnetic film 2 and a conductor 1-2 in the long-side direction. If the magnetic field to be measured is applied along the direction of the long side of the magnetic film 2, the conductor 1-1 perpendicular to the direction of the magnetic field to be measured on the coil 1 can cause a sensing response in the direction of the lon...