GS sheet product capable of realizing full coverage of aluminum spraying by brand-new spraying method
A full-coverage and full-coverage technology, applied in the direction of pressure inorganic powder coating, etc., can solve the problems of short life and easy corrosion of old GS chips, and achieve the effect of prolonging the service life and avoiding the corrosion rate.
Inactive Publication Date: 2020-07-28
SHENYANG FORTUNE PRECISION EQUIP CO LTD
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Problems solved by technology
[0003] In view of the above existing problems, the GS sheet of the present invention adopts a brand-new spraying process method to realize the complete coverage of the aluminum coating and solve the problems of the old version of the GS sheet being easy to corrode and having a short service life.
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[0019] First, use a substrate sample of 300*150*0.2mm, line-spray the upper and lower surfaces with a thickness of 100-120um, and then spray the side with a thickness of 20-40um. Finally, an electron microscope was used to examine the coating coverage and film thickness.
[0020] Using the new spraying process method, observe the sample under the electron microscope, figure 2 It can be observed that the coating has been completely covered around the part.
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The invention relates to a GS sheet product capable of realizing full coverage of aluminum spraying by a brand-new spraying method. The GS sheet product comprises the following steps of: (1) sprayinga key surface of a part, and then spraying a non-key surface of the part by adopting a stacking method; (2) realizing full coverage of an aluminum coating by spraying without exposure; and (3) takingout a sample, and observing the coverage condition of the aluminum coating under an electron microscope. In the step (1), the stacking number is any number greater than 10. In the step (1), the diameter of aluminum powder sprayed on the non-key surface is 10-20 microns. According to the product, the aluminum spraying coating completely covers a base material, the corrosion rate of corrosive gas isreduced, and the service life of the product is prolonged.
Description
technical field [0001] The invention belongs to the Grounding Strap (GS) sheet of semiconductor equipment parts. This product realizes the complete coverage of aluminum coating, and the thinnest coating is not less than 20um. Background technique [0002] In recent years, with the rapid development of semiconductor equipment, the requirements for components of semiconductor equipment are getting higher and higher. GS chip is a common component of semiconductor equipment, which is a consumable of semiconductor equipment. Due to the upgrading of the working conditions of the client, the coating layer of GS chip on the market is not completely covered, and the side wall is easy to corrode during use, which can no longer meet the service life requirements. GS sheets fully covered by aluminum plating are urgently needed to be developed. Contents of the invention [0003] In view of the above existing problems, the GS sheet of the present invention adopts a brand-new spraying p...
Claims
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IPC IPC(8): C23C24/04
CPCC23C24/04
Inventor 张照宇侯涛谢华张婷
Owner SHENYANG FORTUNE PRECISION EQUIP CO LTD
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