System and method for evacuating a process room
A space, external air technology, applied in the direction of pump combination for elastic fluid rotary piston type/oscillating piston type, non-variable displacement pump, radial flow pump, etc., can solve the problem of taking too long
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[0043] The invention relates to a system and a method for evacuating a process space, in particular a process space with a large volume.
[0044] Large volume process space means the volume to be evacuated is more than 10,000 m 3 , especially more than 20,000 m 3 The order of magnitude of the process space.
[0045] figure 1 with figure 2 Each shows a schematic block diagram of a system 10 for evacuating a process space 11 in two different operating states.
[0046] The system 10 for evacuating a process space 11 has a first compressor 12 and a second compressor 13 .
[0047] The first compressor 12 is driven by an electric motor 14 which transmits driving power to the first compressor 12 via a transmission 15 . The second compressor 13 is similarly driven by an electric motor 16 which transmits drive power to the second compressor 13 via a transmission 17 .
[0048] The first compressor 12 may be coupled to the process space 11 via a first inflow line 18 . The second ...
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