High-vacuum degree screw type vacuum pump

Abstract

The invention discloses a high-vacuum degree screw type vacuum pump. The high-vacuum degree screw type vacuum pump comprises a pump housing, a driving screw, a driven screw, a motor and bearing pedestals, wherein the driving screw and the driven screw which are meshed are horizontally arranged in the pump housing; the motor which is connected with the driving screw is arranged outside the pump housing; threaded teeth of which the rotating directions are opposite are arranged on the driving screw and the driven screw; the bearing pedestals which are connected with two ends of the driving screwand the driven screw are arranged in the pump housing; a cooling pipe is arranged on the inner wall of the pump housing for cooling heated screws; cooling liquid is injected in the cooling pipe; and afiltering device is arranged in an air inlet of the pump housing. According to the high-vacuum degree screw type vacuum pump disclosed by the invention, the spiral distributed cooling pipe is arranged on the inner wall of the pump housing, so that reducing the temperature generated by cooperation of the screws in the pump housing is facilitated, and the situation that the screws are worn caused by that the temperature in the pump housing is too high is avoided; the filtering device is arranged at the air inlet, so that the situation that impurities enter the pump housing is avoided, metal sludges can be adsorbed and collected, the situation that foreign matter is in contact with the screws, and the screws are worn is avoided, and high vacuum degree of the pump body during working is guaranteed.

Description

technical field [0001] The invention relates to the field of mechanical vacuum pumps, in particular to a screw vacuum pump with high vacuum degree. Background technique [0002] The screw vacuum pump is an air extraction device that uses a pair of screws to perform synchronous high-speed reverse rotation in the pump casing to generate air suction and exhaust. Gas occasions with a small amount of dust are widely used in domestic pharmaceutical, chemical, semiconductor and other enterprises with high requirements for clean vacuum. When the current vacuum pump is running, a large amount of heat will be generated due to the high-speed operation of the two screws. Due to thermal expansion and contraction, the distance between the screws will change, resulting in increased friction between the screws, which will affect the pump body. In addition, the working environment is also an important factor affecting the working stability of the vacuum pump, especially when the impurities ...

AI Technical Summary

Problems solved by technology

When the current vacuum pump is running, a large amount of heat will be generated due to the high-speed operation of the two screws. Due to thermal expansion and contraction, the distance between the screws will change, resulting in increased friction between the screws, which will affect the pump body. In addition, the working environment is also an important factor affecting the stability of the vacuum pump, especially after the impurities in the external environment enter the pump body, it will cause wear to the screw in the pump body, which will affect the normal operation of the pump body

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