A wafer automatic sorting machine

Abstract

The invention belongs to the technical field of wafer production equipment and provides an automatic wafer sorting machine, which includes a frame, a material rack, a wafer pick-and-place device and a controller; the material rack is divided into an area to be sorted and a sorting completed area area, and are respectively equipped with a flower basket positioning mechanism corresponding to the placement position of the flower basket; the wafer pick-and-place device includes a mounting frame, and a mounting plate driven by the first driving device is installed on the mounting frame slidingly along the X-axis direction. The mounting seat driven by the second driving device and sliding along the Z-axis direction, the supporting plate driven by the third driving device is slidably installed on the mounting seat along the Y-axis direction, and the end of the supporting plate has a wafer holding part; the controller respectively It is connected with the flower basket positioning mechanism, the first driving device, the second driving device and the third driving device. Compared with the traditional artificial wafer sorting, the present invention not only greatly improves the sorting efficiency, effectively avoids sorting errors, does not cause scratches to the wafers, and can sort and place the substrate numbers of the sorted wafers.

Description

technical field [0001] The invention relates to the technical field of wafer production equipment, in particular to an automatic wafer sorter. Background technique [0002] Wafer refers to the silicon wafer used to make silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. In the process of wafer processing, due to external factors, the type and quality of the produced wafers will be different. Usually, the AOI test is carried out in the automatic optical inspection machine. After the type and quality of the wafer are detected, then according to the type and quality Different wafers are sorted to separate different wafers. During the inspection and sorting process of wafers, flower baskets are usually used to place, store, transport and transport wafers to simplify transportation and minimize the risk of contamination; in the sorting process, flower baskets are divided into flower baskets to be sorted and returned There are wafers ...

AI Technical Summary

Problems solved by technology

[0005] Specifically, the technical problem to be solved by the present invention is to provide an automatic wafer sorting machine to solve the problems of low sorting efficiency, inability to sort substrate numbers, and easy sorting errors existing in manual wafer sorting. and scratch wafer technical issues

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