Wafer front-end conveying system

A technology for conveying systems and wafers, which is applied in the manufacture of conveyor objects, electrical components, and semiconductor/solid-state devices. It can solve problems such as defect detection and wafer alignment, and achieve time reduction, volume reduction and improvement efficiency effect
CN111554601AActive Publication Date: 2020-08-18SHANGHAI GUONA SEMICON TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI GUONA SEMICON TECH CO LTD
Publication Date
2020-08-18

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Abstract

A wafer front-end conveying system comprises a loading table and a defect detection module, and the defect detection module is used for detecting defects of a wafer and aligning the wafer before the wafer enters an equipment end and comprises a wafer carrying table used for fixing the wafer needing defect detection; an image acquisition module which comprises a camera array, and obtains a first detection image corresponding to the whole surface of the wafer on the wafer carrying table through one-time shooting of the camera array or obtains a circle of alignment detection image corresponding to the edge of the wafer through one-time shooting of the camera array; a defect judging module which is used for judging whether defects exist on the surface of the wafer or not according to the firstdetection image obtained by the image obtaining module; and an alignment module which is used for obtaining the position of the wafer on the wafer carrying table according to the position of the notch in the alignment detection image. The wafer front-end conveying system has both the functions of defect detection and alignment.
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Description

technical field

[0001] The invention relates to the field of semiconductors, in particular to a wafer front-end conveying system with a high-speed defect detection function. Background technique

[0002] The integrated circuit (integrated circuit) industry is the core of the electronic information industry and one of the most important high-tech technologies to promote the development of national economy and social informatization.

[0003] The characteristics of the integrated circuit manufacturing industry are ultra-precision, ultra-clean environment and miniaturization. Its processing technology design has nearly a hundred procedures (including photolithography, etching, grinding, deposition, implantation and other procedures), among which there are many important process links It needs to be done in a vacuum environment. In the production process of integrated circuits, wafers (silicon wafers) need to be efficiently transported and positioned between different process p...

Claims

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