Preparation method of inclined grating, embossing template
A technology for inclined gratings and printing templates, which is applied in the direction of diffraction gratings, photomechanical equipment, and photoplate-making processes for patterned surfaces, and can solve problems such as difficulties in preparing inclined gratings
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Embodiment 1
[0034] like Figure 1 to Figure 5b As shown, this embodiment provides a method for manufacturing a tilted grating 61, including:
[0035] S11, such as Figure 3a As shown, a flexible material layer 2 is formed on a substrate 1 .
[0036] S12, such as Figure 3b As shown, the magnetic material layer 3 is formed on the surface of the flexible material layer 2 away from the substrate 1 .
[0037] Wherein, that is to say, the flexible material layer 2 and the magnetic material layer 3 are sequentially formed on the same surface of the substrate 1 .
[0038] S13, such as Figure 3c and Figure 3d As shown, the flexible material layer 2 and the magnetic material layer 3 are patterned, the flexible material layer 2 forms a plurality of columnar flexible structures 21 distributed at intervals, and the magnetic material layer 3 forms a plurality of columnar magnetic structures 31 distributed at intervals, And the flexible structure 21 is in one-to-one correspondence with the magn...
Embodiment 2
[0045] like Figure 1 to Figure 5b As shown, this embodiment provides a method for manufacturing a tilted grating 61, including:
[0046] S21, such as Figure 3a As shown, a flexible material layer 2 is formed on a substrate 1 .
[0047]Preferably, the material for forming the flexible material layer 2 is polyimide (PI) or polyethylene terephthalate (PET). It should be noted that the forming material of the flexible material layer 2 is not limited to the materials listed above, and may also be other suitable materials. The substrate 1 can be a wafer glass substrate, or other suitable types of substrates.
[0048] In addition, the flexible material layer 2 can be formed on the substrate 1 by coating.
[0049] S22, such as Figure 3b As shown, the magnetic material layer 3 is formed on the surface of the flexible material layer 2 away from the substrate 1 .
[0050] Preferably, the material for forming the magnetic material layer 3 includes one or more of iron, cobalt, nic...
Embodiment 3
[0080] like Figure 1 to Figure 5b As shown, this embodiment provides an imprint template 4 for preparing a sloped grating 61, based on the method for preparing the sloped grating 61 in Embodiment 1 or Embodiment 2, the imprint template 4 includes:
[0081] base1;
[0082] A plurality of flexible structures 21 are located on the substrate 1, and the flexible structures 21 are columnar and distributed at intervals;
[0083] A plurality of magnetic structures 31 are located on the side of the flexible structure 21 away from the substrate 1. The magnetic structures 31 are columnar. The flexible structures 21 correspond to the magnetic structures 31 one by one. When the position of the substrate 1 remains unchanged, when the magnetic structure 31 receives a magnetic force The change can drive the position of the flexible structure 21 relative to the base 1 to change.
[0084] Wherein, that is to say, the flexible structure 21 and the magnetic structure 31 are stacked on each oth...
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