Cathode filament fixing, insulating and tightening device
A cathode wire and spring fixing technology, which is applied in ion implantation plating, metal material coating process, coating, etc., can solve problems affecting vacuum tube coating, cathode wire and vacuum tube short circuit, etc.
Pending Publication Date: 2020-10-13
INST OF HIGH ENERGY PHYSICS CHINESE ACADEMY OF SCI
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Problems solved by technology
[0005] For this reason, the application proposes a cathode wire fixing and insulating tightening device to solve the short circuit phenomenon between the cathode wire and the vacuum tube when coating a slit vacuum tube with a size below 6 mm in the prior art, thereby affecting the coating of the vacuum tube. technical problem
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[0020] Embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary, and are intended to explain the present application, and should not be construed as limiting the present application.
[0021] In related technologies, when the DC magnetron sputtering method is used to coat the inner wall of the vacuum tube, the traditional cathode wire fixing method may cause the cathode wire to deviate from the center of the vacuum tube, resulting in a short circuit between the cathode wire and the vacuum tube, thereby affecting Continue to coat vacuum tubes.
[0022] When the DC magnetron sputtering method is used to coat the inner wall of the vacuum tube, it is necessary to ensure that the cathode wire is in the center o...
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Abstract
The invention provides a cathode filament fixing, insulating and tightening device for slit coating on a vacuum tube. The cathode filament fixing, insulating and tightening device includes a ceramic assembly, a spring, and a metal fixing part. The ceramic assembly is used to support a cathode filament, the spring is fixed to the bottom of the ceramic assembly, and the metal fixing part is arrangedabove the spring and is used to fix the cathode filament under the spring force. Therefore, the cathode filament is supported by the ceramic assembly, so that the cathode filament is maintained in the center position of the upper and lower tube walls of the vacuum tube, the metal fixing part has a greater friction with the cathode filament under the elastic force of the spring to ensure that theshort circuit situation caused by the cathode filament deviating from the center position due to the ceramic assembly slipping off at the time of the cathode filament in a vertical state does not occur, the bending of the vacuum tube during installation is avoided, the short circuit of the cathode filament caused by the ceramic assembly slipping off or displacing is avoided, and the problem that when the slit vacuum tube with a size below 6mm is coated, coating of the vacuum tube is affected due to a short circuit between the cathode filament and the vacuum tube is avoided.
Description
technical field [0001] The present application relates to the field of coating technology, in particular to a cathode wire fixing insulation tightening device. Background technique [0002] Synchrotron radiation light sources are gradually developing towards high brightness and low emittance, which requires the magnet aperture to be as small as possible, which leads to a very small size of the vacuum tube. In addition, in order to prevent the synchrotron radiation light caused by the beam from directly irradiating the tube wall of the vacuum tube, a photon channel is generally added on the side of the vacuum tube. However, limited by the space of the magnet, the photon channel is generally a flat rectangular structure with a small height. For example, the height of the photon channel of the fourth-generation synchrotron radiation source is only 6 mm. In addition, due to the limitation of the volume of the magnet, the length of a single vacuum tube generally needs to be grea...
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IPC IPC(8): C23C14/35
CPCC23C14/35C23C14/3407
Inventor 马永胜黄涛孙飞刘佰奇郭迪舟何平董海义
Owner INST OF HIGH ENERGY PHYSICS CHINESE ACADEMY OF SCI