Biaxial silicon micro-accelerometer based on resonator energy localization effect

Abstract

The invention discloses a biaxial silicon micro-accelerometer based on a resonator energy localization effect. The biaxial silicon micro-accelerometer comprises an upper signal sensitive structure anda lower signal leading-out structure. The upper signal sensitive structure is processed by a silicon micromachining technology, the lower signal leading-out structure is processed by a glass wet etching and metal layer sputtering technology, and the upper signal sensitive structure is bonded on the lower signal lead-out structure by an anodic bonding technology. According to the biaxial inertialacceleration measurement, the difference of the vibration amplitude proportions of the two groups of weakly coupled resonators with consistent structural parameters is used as an overall output signal, so that the occurrence of a severe nonlinear region of an output response curve is avoided, the external common-mode interference is effectively inhibited, and the environmental stability of the accelerometer is further improved.

Description

Technical field [0001] The invention relates to the field of micro-electromechanical systems and micro-inertial measurement, in particular to a biaxial silicon micro-accelerometer based on the energy localization effect of a resonator. Background technique [0002] Microelectromechanical systems refer to high-tech devices with dimensions of a few millimeters or less, and their internal structures are usually on the order of micrometers or nanometers. MEMS design various applied sciences and engineering technologies, and has broad application prospects in the fields of intelligent systems, consumer electronics, smart homes, wearable devices, and microfluidic technology. [0003] Silicon micro accelerometer is a typical inertial sensor realized by MEMS processing technology. It is the core component of inertial navigation, guidance, orientation, motion carrier measurement and control. Compared with traditional accelerometers, it has a small size, light weight, Low cost, low energy c...

AI Technical Summary

Problems solved by technology

However, at present, the sensitivity and resolution of the general silicon micro-accelerometer are greatly reduced as the structure size is greatly reduced, and are greatly affected by parasitic effects, mechanical structure noise, circuit noise, etc., and have basically reached the limit of detection capabilities. , its accuracy is only maintained at the low-to-medium precision level, which can only basically meet the application requirements of low-to-medium precision, and it is very difficult to further greatly improve the measurement accuracy

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