A MEMS Piezoelectric Sensor for Measuring the Curvature of Microscale Charge Detonation Wave Front

Abstract

A MEMS piezoelectric sensor for measuring the curvature of the detonation wave front of a micro-scale charge, including a base, on which a lower output electrode and a lower pad are sputtered, and the lower output electrode and the lower pad are connected by a lower wire to form a lower layer Output layer; the lower output layer is spin-coated and cured to form a PVDF-TrFE film layer, and the PVDF-TrFE film layer is polarized in a silicon oil bath, and the PVDF-TrFE sensitive element is obtained by ion etching to form a PVDF-TrFE piezoelectric layer; PVDF ‑TrFE piezoelectric layer is sputtered with an upper output electrode and an upper pad, and the upper output electrode and the upper pad are connected by an upper wire to form an upper output layer; the lower and upper output electrodes are arranged in an axially aligned manner; the lower, The upper layer pad adopts the vertical layout method connected by the lower layer wire and the upper layer wire; the upper layer output layer is coated with a protective layer; the sensor has the characteristics of small size of sensitive element, high precision, multi-point acquisition, etc., and is suitable for various test conditions Measurement of curvature of detonation wave fronts under microscale charges.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric sensors, and in particular relates to a MEMS piezoelectric sensor for measuring the curvature of a microscale charge detonation wave front. Background technique [0002] With the needs of national defense science and technology applications, traditional pyrotechnics technology has been integrated into micro-electromechanical system technology, micro-nano energetic material technology and other high-tech technologies to form a new type of pyrotechnics with the main characteristics of sequence integration, energy conversion informationization, and structural miniaturization. In China, pyrotechnic products with such characteristics are called fourth-generation pyrotechnic products. Compared with traditional pyrotechnics, the design and application of new pyrotechnics usually include the energy transfer and response characteristics of energetic materials under the condition of micro-scale charge...

AI Technical Summary

Problems solved by technology

The high-speed photography method is to record the luminous trajectory of the detonation wave front along the charging direction by means of high-speed scanning of the framing camera, and obtain the curvature of the detonation wave front through the analysis and calculation of the luminous trajectory, but the test system is complex and expensive, and the data The cumbersome limitations prevent it from being widely used in micro-scale charge detonation wave front curvature testing

The optical fiber method detonation wave front curvature test is to determine the position-time relationship of the detonation wave by the time difference when multiple optical fiber probes installed at the front of the detonation wave front receive a certain intensity of optical power, and further calculate the detonation wave front curvature. Wavefront curvature, the method has the following problems. First, the optical fiber needs to be fixed axially based on the grain, which makes it difficult to accurately locate the radial port position of the optical fiber. The position of the optical fiber is non-repeatable, which affects the accuracy of the data. Factors such as uniformity and fiber length all have a certain influence on the acquisition of optical power signals

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