Additive manufacturing device and method based on hollow AFM probe localized electro-deposition

Abstract

The invention discloses an additive manufacturing device and method based on hollow AFM probe localized electro-deposition, and belongs to the technical field of additive manufacturing. The additive manufacturing device comprises a vibration isolation system, an additive manufacturing device body, a cleaning buffer solution unit, a precise positioning system, a monitoring system and an electrode unit. According to the invention, maskless high-locality deposition of the metal microstructure can be realized by using a hollow AFM probe locality electro-deposition technology; through the high-precision force control technology of the AFM cantilever, the high-positioning-precision pressure of the Z axis is liberated, the coupling contradiction between high moving displacement precision and blockage and short circuit prevention and control is solved, and forward micro-additive manufacturing of a submicron metal three-dimensional cantilever structure is truly realized; a microfluid technologyand an AFM probe technology are integrated through a localized electrochemical technology, conversion from electric field locality to liquid feeding locality is completed, the intrusive idea of infinitely reducing the size of an anode is changed, and therefore high-locality deposition is achieved more easily.

Description

technical field [0001] The invention belongs to the technical field of additive manufacturing, and in particular relates to an additive manufacturing device and method based on localized electrodeposition of a hollow AFM probe. Background technique [0002] Electrochemical deposition manufacturing technology is a technology based on the principle of electrochemical cathode deposition, which is to convert metal ions in an inert metal salt solution into metal atoms through electrochemical reduction. The principle of localized electrochemical deposition technology is simple, easy to operate, no inert gas environment or vacuum environment, no thermal residual stress, no subsequent annealing treatment. The development of localized electrochemical deposition technology is benefited from the development of electrode manufacturing technology. From the beginning of the solid metal electrode, the diameter of the electrode is gradually reduced to improve the localization of metal depo...

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Problems solved by technology

However, some of these methods require cumbersome mask operation steps, some require external energy input with high energy density, some operations require a vacuum environment, some require strict hardware micro-movement resolution, and some cannot achieve true fixed Various restriction methods such as regional processing

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