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Halogen generator

A halogen gas and halide technology, applied in gas generating devices, chemical instruments and methods, and chemical methods for reacting gases with non-granular solids, etc., can solve the problems of large space occupation and expensive manufacturing of gas storage boxes

Active Publication Date: 2020-10-27
FEI CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

These tanks are expensive to manufacture, take up a lot of space and require separate venting of the tank to avoid potentially dangerous gas mixing

Method used

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  • Halogen generator

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[0013] I. Definition

[0014] The following explanations of terms and abbreviations are provided to better describe the present invention and guide those of ordinary skill in the art in the practice of the present invention. Unless the context clearly dictates otherwise, as used herein, "comprises" means "comprises" and the singular form "a or an" or "the" includes plural references. Unless the context clearly dictates otherwise, the term "or" refers to a single element of stated alternative elements, or a combination of two or more elements.

[0015] Unless otherwise explained, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Although methods and materials similar or equivalent to those described herein can be used in the practice or testing of the present invention, suitable methods and materials are described below. The materials, methods, and examples are illus...

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Abstract

Disclosed herein are embodiments of a method and system for producing a halogen gas. The method may comprise contacting a solid oxidizing agent with a vapor comprising a halide compound, to produce agas stream comprising a halogen corresponding to the halide in the halide compound. The halide compound may be an acyl halide, such as an acetyl halide or an oxalyl halide. The oxidizing agent may beany suitable oxidizing agent, and in certain examples, potassium permanganate is used. The method may be performed under a reduced pressure. Also disclosed herein is a system suitable to perform the disclosed method. The system may comprise a reservoir, an oxidizing agent support and a gas stream outlet.

Description

Background technique [0001] The use of halide gas precursors in manufacturing and imaging tools often requires several safety precautions. These safety precautions are costly and require multiple levels of support to provide just one gas to the tool. In some instances, a desired gas may be avoided due to difficulties associated with gas storage and gas delivery to the tool. For example, gas boxes are required to store and deliver chlorine and bromine. Such tanks are expensive to manufacture, take up a lot of space and require separate venting of the tanks to avoid potentially dangerous gas mixing. An existing product that can be used for such storage and delivery of chlorine is Nanochemix, and even if the chlorine cylinder is at sub-atmospheric pressure, it needs to be equipped with a chlorine sensor to prevent leakage. Bromine is not currently available due to its difficulty in handling, and bromine liquid is corrosive to stainless steel welding and is best kept in expensi...

Claims

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Application Information

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IPC IPC(8): C01B7/03C01B7/09
CPCC01B7/03C01B7/096B01J7/00B01J15/00
Inventor C.钱德勒
Owner FEI CO
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