Multi-target-position denudation device for overcoming spatial position effect in laser micro-area in-situ test
A technology of in-situ testing and spatial location, applied in measuring devices, laser welding equipment, thermal excitation analysis, etc., can solve problems such as memory effect, element fractionation, small position effect and memory effect, and affect the accuracy of results, and achieve the goal of overcoming Spatial position effect, reduce memory effect, avoid turbulence effect
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[0021] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0022] The overall structure of a multi-target ablation device that overcomes the spatial position effect in the laser micro-area in-situ test provided by the present invention is as follows: figure 1 As shown, it includes a sample stage 1, a laser head 2, an ablation pool 3, a vacuum generator 11, and a three-axis displacement platform (the three-axis displacement platform is not shown in the figure), and the laser head is installed on the laser generator (not shown in the figure). Out of the laser generator), the ablation pool is fixed directly below the laser head through a connecting rod 4, the sample stage is installed on a three-axis displacement platform, and the sample stage is located under the ablation pool. The three-axis displacement platform realizes the precise displacement of the sample stage in the X, Y, Z three-axis direction...
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