A device for recovering powder based on vacuum environment
A technology of vacuum environment and vacuuming device, applied in the direction of spray device, device for coating liquid on the surface, coating, etc., can solve the problems of complex structure, high cost, affecting the working efficiency of equipment, etc. Low equipment cost and energy saving effect
Active Publication Date: 2022-03-08
JIHUA LAB
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Problems solved by technology
[0005] The purpose of the present invention is to provide a device for recovering powder based on a vacuum environment, aiming at solving the problem that the existing nano-scale powder recovery device has a complex structure, high cost, cannot filter out nano-scale powder well, and cannot continue to recover powder while recovering the powder. Ensure the vacuum environment, which seriously affects the working efficiency of the equipment
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[0024] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0025] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating ...
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The invention discloses a powder recovery device based on a vacuum environment, which includes a powder collection tank that can pass through gas but not powder, the gas inlet of the powder collection tank is connected with a vacuum chamber, and the gas outlet of the powder collection tank is connected with a vacuum chamber. Device connection: the vacuum device is started to form a vacuum environment in the vacuum chamber, and the chips in the vacuum chamber are powder sprayed, and the excess powder in the vacuum chamber is sucked into the powder collection tank due to the pressure difference to realize collection; this is based on the vacuum environment The structure of the powder recovery device is simple, and it can filter and recover powder, especially nano-scale powder such as fluorescent powder, while maintaining a vacuum environment; a vulcanized filter plate is installed in the powder collection tank, which can realize effective filtration and recovery of nano-scale powder; The powder device does not require other external forces, and only needs the pressure difference formed when the vacuum pump is vacuumed to bring the powder into the powder collection tank, improving work efficiency and saving energy.
Description
technical field [0001] The invention relates to the field of vacuum machinery, in particular to a powder recovery device based on a vacuum environment. Background technique [0002] After spraying nano-scale powder on the chip in a vacuum environment, based on the cost and the requirement to ensure the normal operation of the equipment, it is necessary to recycle the excess powder. If the powder is not recovered in time, the excessive powder will be lost when the vacuum pump is evacuated again. Will be sucked into the pump and damage the structure of the pump. [0003] In a vacuum environment, when recovering redundant nano-powders, a nano-scale powder recovery device is generally connected between the vacuum pump and the vacuum chamber. For example, there is CN201320561879.8 in the patent, which uses cyclone separation recycler and pulse blowback filter to recycle the redundant powder spraying, and solves the problem of air pollution caused by unadsorbed powder. However, ...
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IPC IPC(8): B05C19/06B05B14/48
CPCB05C19/06B05B14/48Y02P70/10
Inventor 郭远军何斌侯少毅黎天韵方威卫红
Owner JIHUA LAB