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Evaporation equipment and evaporation method

A technology of evaporation and equipment, applied in the field of display, can solve the problem of high heat radiation of the substrate

Pending Publication Date: 2020-11-17
YUNGU GUAN TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of this, an embodiment of the present invention provides an evaporation equipment and an evaporation method to improve the problem of high heat radiation of the substrate existing in the evaporation equipment in the prior art

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  • Evaporation equipment and evaporation method
  • Evaporation equipment and evaporation method

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Embodiment Construction

[0041] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0042] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right" etc. is based on the orientation or positional relationship shown in the drawings , is only for the convenience of describing the present invention, but does not indicate that the device or element referred to must have a specific orientation, so it should not be constr...

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Abstract

The embodiment of the invention provides evaporation equipment and an evaporation method. The evaporation equipment comprises at least one rail, at least one evaporation source and at least two operation units, wherein the evaporation source moves along the rail, the operation units are arranged right above the rail, orthographic projections of the operation units on the rail are not overlapped, the operation units are used for placing a to-be-evaporated substrate, and the evaporation source passes through the position below each operation unit once when moving along the rail. According to theevaporation equipment, the evaporation source passes through the position below each operation unit once, so that the situation that an evaporation source in the prior art passes through the operation unit twice for a round trip is avoided, the heat radiation of the to-be-evaporated substrate can be effectively reduced, and the substrate is further prevented from being damaged.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an evaporation device and an evaporation method. Background technique [0002] Organic light-emitting diode (Organic Light-Emitting Diode, OLED) display technology is a display technology with great development prospects. It can realize the advantages of flexible display and so on, and is widely used in the display field. The OLED display device specifically includes basic film layers such as an anode, a hole transport layer, a light emitting layer, an electron transport layer, and a cathode, and each film layer is formed on a substrate by vacuum evaporation. [0003] However, the existing evaporation equipment has the problem of excessive heat radiation to the substrate, resulting in damage to the substrate. Contents of the invention [0004] In view of this, an embodiment of the present invention provides an evaporation device and an evaporation method, so as to improve th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/12C23C14/56
CPCC23C14/24C23C14/12C23C14/568
Inventor 颜明哲
Owner YUNGU GUAN TECH CO LTD