Exhaust gas neutralization system for CVD coating apparatus

Abstract

The invention relates to the technical field of metal cutting tools and tool and mold coatings, and discloses an exhaust gas neutralization system for a CVD coating apparatus. The system comprises a cooling water float flowmeter with a magnetic induction switch, a PH meter and an overflow water collecting tank frame, and the exhaust gas neutralization system for the CVD coating apparatus is provided with an N2 protection system through a waste gas inlet, so that a part of cavitation can be counteracted. The service life of a liquid ring vacuum pump is prolonged, the cost of the apparatus is reduced, the cooling water float flowmeter is provided with the magnetic induction switch, whether the flow of cooling water reaches a set value or not can be sensed in real time, when the cooling waterflow meter is smaller than the set value, the magnetic induction switch is not triggered, after a plurality of seconds of delay, the system sends out an alarm prompt of insufficient flow, when the flow of the cooling water reaches or exceeds the set value, the magnetic induction switch is triggered, the system does not send out the alarm prompt, so that an operator can conveniently and accuratelyknow an actual flow of the cooling water in real time, and the operator is informed in time through the alarm when the flow meter is insufficient.

Description

technical field [0001] The invention relates to the technical field of metal cutting tools and mold coating, in particular to an exhaust gas neutralization system for CVD coating equipment. Background technique [0002] CVD is a method of forming a film on the surface of metal processing workpieces of other materials (substrates), such as molds, cutting tools, wear-resistant, corrosion-resistant parts, etc., especially the film formation method. The characteristic of chemical vapor deposition is that the reaction gas The chemical reaction of the compounds involved proceeds, the main product of the desired chemical reaction is deposited on the substrate surface and forms a coating or film there, possible reaction by-products appear in gaseous form and must be removed from the gas mixture In order to ensure the performance of the layer film, this is achieved through the exhaust pipeline. The service life of the coated cutting tools and tools will be greatly improved, and the c...

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Problems solved by technology

[0003] In the existing common technology, there is no N2 protection system with waste gas inlet, no lye pH measurement sensor, no liquid level gauge in the lye tank, and no magnetic sensor switch for the chilled water float flowmeter, so that there is no waste gas The N2 protection system at the inlet will cause the liquid ring vacuum pump to be strongly cavitated by the exhaust gas, resulting in a reduction in the service life of the liquid ring vacuum pump. Because there is no lye pH measurement sensor, the on-site operation and maintenance personnel cannot accurately know the amount used to neutralize the waste liquid. The PH value of lye can only rely on the traditional detection method of artificially using PH test paper. The lye tank does not have a liquid level gauge, and the on-site operation and maintenance personnel cannot conveniently and accurately judge the liquid level in the tank, so they can only manually open the tank. Check the actual liquid level. The chilled water rotameter does not have a position switch. When the cooling water flowmeter is lower than the desired value, it cannot be detected in time and there is no alarm reminder effect.

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