Plasma enhanced chemical vapor deposition equipment

Abstract

The invention relates to the technical field of coating, in particular to plasma enhanced chemical vapor deposition equipment. The equipment comprises a vacuumizing mechanism, a reaction mechanism anda transferring mechanism, the vacuumizing mechanism communicates with the reaction mechanism, the transferring mechanism feeds a to-be-treated product into or takes the to-be-treated product out of the reaction mechanism, and the reaction mechanism comprises a reaction chamber, an electrode assembly and a bearing assembly; and the electrode assembly is arranged at the top end of the reaction chamber and moves in the reaction chamber, the bearing assembly is arranged at the bottom end of the reaction chamber and moves in the reaction chamber, the electrode assembly comprises at least one air outlet device, each air outlet device sequentially comprises a dispersion pipe and a dispersion ball head from top to bottom, and a plurality of uniformly distributed dispersion holes are formed in thedispersion pipe and the dispersion ball head. Therefore, coating gas can be dispersed in all directions from the dispersion pipe and the dispersion ball head, the coating gas can be uniformly adheredto the inner wall of a vaccine bottle, the problems of coating defects and incompleteness of the inner wall of the vaccine bottle are avoided, and the production quality of the vaccine bottle is improved.

Description

technical field [0001] The invention relates to the technical field of coating, in particular to a plasma-enhanced chemical vapor deposition device. Background technique [0002] Plasma Enhanced Chemical Vapor Deposition (PECVD) is the use of microwave or radio frequency energy to ionize the gas containing the atoms of the film into a mixture of high-energy atoms, positive and negative ions, electrons, etc., to form plasma and deposit the film, Thus, high-speed film formation is achieved. [0003] The inner walls of some bottle-like objects, including vaccine bottles, are often coated. At present, the common way is to put the vaccine bottle upside down, and the gas used for coating rises from the bottom at the mouth of the vaccine bottle and then adheres to the inner wall of the vaccine bottle to complete the coating. However, in the common method, since the gas used for coating rises from the bottom to the top, the electroplating film at the mouth of the vaccine bottle is...

AI Technical Summary

Problems solved by technology

However, in the common method, since the gas used for coating rises from the bottom up, the electroplating film at the mouth of the vaccine bottle is prone to uneven plating, and even electroplating defects and incompleteness, which greatly affect the quality of the vaccine bottle. production quality

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