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Method of making organoaminosilane

An aminosilane, organic technology, applied in the field of preparing organoaminosilane, can solve problems such as increased production cost, limited known methods, limitations and the like

Pending Publication Date: 2020-12-04
DOW SILICONES CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method has limited commercial applicability because of the limited known methods for producing organoaminofunctional silane or organoaminofunctional disilane materials
The process is limited because the pressure of the added hydrosilane and the hydrogen generated in the process limits the amount of hydrosilane that can be added to the reactor to react with the amine
Limiting the amount of hydridosilane that can be added reduces the amount of organoaminofunctional silane or organoaminofunctional disilane material that can be produced on a commercial scale, increasing production costs

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0065] In an inert glove box, 1.7 g of dibutylmagnesium was slowly added to a flask containing a stirred mixture of 60 g of diisopropylamine and 459 g of 1,4-diisopropylbenzene at room temperature. The resulting mixture was then charged to a 1.5L Parr reactor. The reactor was pressurized to 551.6 kPa with argon and the back pressure regulator on the vent line of the reactor was set to 580 kPa. The reactor was then heated to 130°C. With agitation at 800 rpm, monosilane was fed to the reactor at a rate of 0.13 SLM through a dip tube. The monosilane feed / headspace evacuation lasted 1.5 hours. The reactor was then cooled, any residual pyrophoric gases from the process were purged, and the material was sampled. About 67 g of diisopropylaminosilane was collected, resulting in a yield of 86% relative to both diisopropylamine and silane. The ratio of diisopropylaminosilane to diisopropylamine to bis-diisopropylaminosilane in the product = 48:1:1.

Embodiment 2

[0069] In an inert glove box, 1.7 g of dibutylmagnesium was slowly added to a stirred mixture of 120 g of diisopropylamine and 395 g of 1,4-diisopropylbenzene at room temperature. The resulting mixture was then charged to a 1.5L Parr reactor. The reactor was pressurized to 551.6 kPa with argon and the back pressure regulator on the vent line of the reactor was set to 580 kPa. The reactor was then heated to 130°C. With agitation at 800 rpm, monosilane was fed to the reactor at a rate of 0.13 SLM through a dip tube. The monosilane feed / headspace evacuation lasted 3.3 hours. The reactor was then cooled, any residual pyrophoric gases from the process were purged, and the material was sampled. About 85 g of diisopropylaminosilane was collected, resulting in a 54% yield relative to both diisopropylamine and silane. The ratio of diisopropylaminosilane to diisopropylamine to bis-diisopropylaminosilane in the product = 46:1:3.

Embodiment 3

[0071] In an inert glove box, 1.7 g of butylethylmagnesium was slowly added to a stirred mixture of 120 g of diisopropylamine and 395 g of 1,4-diisopropylbenzene at room temperature. The resulting mixture was then charged to a 1.5L Parr reactor. The reactor was pressurized to 551.6 kPa with argon and the back pressure regulator on the vent line of the reactor was set to 580 kPa. The reactor was then heated to 130°C. With agitation at 800 rpm, monosilane was fed to the reactor at a rate of 0.13 SLM through a dip tube. The monosilane feed / headspace evacuation lasted 3.3 hours. The reactor was then cooled, any residual pyrophoric gases from the process were purged, and the material was sampled. About 38 g of diisopropylaminosilane was collected, resulting in a 24% yield relative to both diisopropylamine and silane. The ratio of diisopropylaminosilane to diisopropylamine to bis-diisopropylaminosilane in the product=94:3:3.

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PUM

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Abstract

Disclosed is a method of making an aminosilane, the method comprising: forming a reaction mixture comprising a hydridosilane, an amine and a dehydrogenative coupling catalyst in a reactor; subjectingthe reaction mixture to conditions sufficient to cause a dehydrogenative coupling reaction between the hydridosilane and the amine to form the aminosilane and hydrogen gas; and venting the hydrogen gas; wherein the forming of the reaction mixture comprising the hydridosilane, the amine and the dehydrogenative coupling catalyst comprises continuously feeding the hydridosilane to the reactor containing the amine and the dehydrogenative coupling catalyst.

Description

[0001] Cross References to Related Applications [0002] none. Background technique [0003] Silylamines have industrial applications, including use as precursors for the deposition of silicon-containing films in photovoltaic and electronic applications. A notable industrial process for the preparation of trisilylamine (TSA) involves the reaction of monochlorosilane with ammonia. In addition to TSA, the process also produces chlorine-containing by-products, such as ammonium chloride. These by-products are undesirable in the final application. For example, halogens are harmful during the formation of silicon-containing films by chemical vapor deposition. Therefore, the lowest possible amount of halogen is desired in these applications. [0004] Trisilylamine is also produced by reacting disilylamine and removing ammonia as a by-product. However, halogens may also be present in the silylamines produced by this process, since halogens may be introduced in existing processes ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C07F7/10C07F7/08
CPCC07F7/10B01J19/0053B01J4/001C07F7/025
Inventor A·E·福斯J·A·马多克B·D·瑞肯M·D·特拉根豪福
Owner DOW SILICONES CORP
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